{"id":"W28751416","doi":"10.1183/13993003.00393-2017","title":"SOME CHEMICAL AND ELECTROCHEMICAL ASPECTS OF THE CHEMICAL MECHANICAL POLISHING OF COPPER","year":2002,"lang":"en","type":"article","venue":"","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Canadian Institutes of Health Research; Reseau canadien de recherche respiratoire; Genome Canada","keywords":"Copper; Polishing; Electrochemistry; Chemical-mechanical planarization; Metallurgy; Materials science; Chemistry; Electrode","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007405807,0.0001527694,0.0002723375,0.0000294389,0.00001355976,0.00001019599,0.0003043192,0.0001725585,0.00003784957],"category_scores_gemma":[0.0001978111,0.0001190609,0.0000781621,0.0001420623,0.0001309243,0.0001659628,0.0001496602,0.0003476169,0.000001396448],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005704632,"about_ca_system_score_gemma":0.000005630573,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000008079885,"about_ca_topic_score_gemma":7.413717e-7,"domain_scores_codex":[0.9990463,0.00001246125,0.0002876852,0.0001634877,0.0002158083,0.0002742848],"domain_scores_gemma":[0.9994466,0.0001110347,0.00004161936,0.000293219,0.00003126761,0.00007628746],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000002830396,0.00002192459,0.00003567342,0.00003747593,0.00001483191,3.015145e-7,0.00005163136,0.000008034902,0.9736314,0.02491243,0.001123319,0.0001600812],"study_design_scores_gemma":[0.0001451614,0.00001028183,0.00001378074,0.00003478623,0.00001159507,0.00001432157,0.00000928939,0.005051463,0.9795163,0.0149789,0.00009013026,0.0001240137],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9907055,0.0006819876,0.001297928,0.0003806485,0.00006073159,0.0001577633,0.000006101451,0.0004440906,0.006265191],"genre_scores_gemma":[0.9891351,0.00007687416,0.01061197,0.00006220642,0.0000603988,0.00000519672,8.649532e-7,0.00003173575,0.00001561967],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00993353,"threshold_uncertainty_score":0.4855164,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009018048068640603,"score_gpt":0.2101300909418093,"score_spread":0.2011120428731687,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}