{"id":"W2888958979","doi":"10.14447/jnmes.v17i1.437","title":"Deposition of High-k Samarium Oxide Membrane on Polysilicon for the Extented-Gate Field-Effect Transistor (EGFET) Applications","year":2014,"lang":"en","type":"article","venue":"Journal of New Materials for Electrochemical Systems","topic":"Analytical Chemistry and Sensors","field":"Chemical Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Samarium; Materials science; Annealing (glass); Hysteresis; Gate oxide; Transistor; Membrane; Field-effect transistor; Optoelectronics; Oxide; Deposition (geology); Analytical Chemistry (journal); Voltage; Electrical engineering; Metallurgy; Inorganic chemistry; Chemistry; Condensed matter physics; Engineering","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007288442,0.0003452321,0.0001400629,0.000115725,0.0001842943,0.0001495859,0.0001990992,0.000319234,0.0008426728],"category_scores_gemma":[0.0001019807,0.0001684082,0.0002019478,0.00009505193,0.0001032174,0.0003607743,0.0001864663,0.0002638069,0.0003132555],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001652956,"about_ca_system_score_gemma":0.0001330095,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003020539,"about_ca_topic_score_gemma":0.000796388,"domain_scores_codex":[0.9999449,0.000004178338,0.000004578392,0.00001707932,0.00001629568,0.00001292448],"domain_scores_gemma":[0.9999515,0.000008063232,0.00001603854,0.000005633726,0.00001194692,0.00000678721],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008510792,0.000001538728,0.00004400365,0.00002308233,0.000001733795,0.00002741457,0.000005310661,0.00001217112,0.9993935,0.00003519433,0.0000183004,0.0004292534],"study_design_scores_gemma":[0.000002031431,0.00003659271,0.0007376245,0.000002447196,0.000005259648,0.0001208459,0.00001028904,0.0002016863,0.9979448,0.00001367901,0.0009219463,0.000002770245],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9862533,0.001315266,0.009150669,0.0001785639,0.0001117861,0.00003120588,0.0002293437,0.0001315652,0.002598364],"genre_scores_gemma":[0.9838381,0.0009935624,0.01242013,0.0000526725,0.00002349062,0.00002328891,0.0001875104,0.0000269179,0.002434288],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008426728,"threshold_uncertainty_score":0.002819002,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006786746166681667,"score_gpt":0.2288519409438139,"score_spread":0.2220651947771323,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}