{"id":"W2895927807","doi":"10.1088/1361-6641/aae810","title":"Contactless non-destructive imaging of doping density and electrical resistivity of semiconductor Si wafers using lock-in carrierography","year":2018,"lang":"en","type":"article","venue":"Semiconductor Science and Technology","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"Natural Sciences and Engineering Research Council of Canada; National Natural Science Foundation of China; Canada Research Chairs","keywords":"Wafer; Electrical resistivity and conductivity; Dopant; Materials science; Doping; Semiconductor; Optoelectronics; Silicon; Optics; Electrical engineering; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["sts"],"consensus_categories":[],"category_scores_codex":[0.0004409743,0.0002353407,0.0005498669,0.001575635,0.0001411641,0.00002954805,0.0003232255,0.0001948211,0.000006825194],"category_scores_gemma":[0.0001925371,0.0002230144,0.00004572173,0.003106255,0.002808355,0.0004223865,0.00009659777,0.0003567165,3.235957e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001403298,"about_ca_system_score_gemma":0.000189562,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000469029,"about_ca_topic_score_gemma":0.000160005,"domain_scores_codex":[0.9983122,0.00002367386,0.0004154246,0.0005043778,0.0002433385,0.0005010252],"domain_scores_gemma":[0.998802,0.00005447348,0.0001358245,0.0003331814,0.0005804854,0.00009402314],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000006065434,0.00001034531,0.08966388,0.00003130593,0.00003313862,0.000004524743,0.000346081,0.000003376749,0.9067833,0.001199004,0.000007112688,0.001911803],"study_design_scores_gemma":[0.0003240048,0.00007711164,0.005113593,0.00011097,0.00005912068,0.00006724057,0.001693743,0.009841243,0.9810699,0.001349856,0.0000186046,0.0002746532],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.998709,0.0006405367,0.000100511,0.00002597527,0.0001606782,0.0001461965,0.00001282272,0.00006722415,0.0001371118],"genre_scores_gemma":[0.9993745,0.00008172367,0.0004793937,0.00001392645,0.00002727919,0.000003107906,0.00000132664,0.0000170184,0.000001741102],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.08455028,"threshold_uncertainty_score":0.9999054,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007095965585328293,"score_gpt":0.2271731329973342,"score_spread":0.2200771674120059,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}