{"id":"W2896180276","doi":"10.2351/1.5056828","title":"Laser spike anneal – Hazard prevention and remote process analysis","year":2015,"lang":"en","type":"article","venue":"","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Optech (Canada)","funders":"","keywords":"Materials science; Wafer; Optoelectronics; Rapid thermal processing; Silicon; Laser; Ion implantation; Semiconductor; Fabrication; Semiconductor laser theory; Dopant; Doping; Optics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001369664,0.0001192248,0.0002085342,0.0002172949,0.00002497387,0.00005735785,0.00006921643,0.00007686411,0.000157999],"category_scores_gemma":[0.00001247905,0.00009710491,0.00008884427,0.0007000851,0.00001719673,0.0001758092,0.000006715704,0.00009446088,0.00002827543],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002960849,"about_ca_system_score_gemma":0.00001688607,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00008715074,"about_ca_topic_score_gemma":0.0006157619,"domain_scores_codex":[0.9993611,0.00001460952,0.000165489,0.0001610003,0.0001389024,0.0001589227],"domain_scores_gemma":[0.9995888,0.000006081317,0.00001982297,0.0001489526,0.0001168588,0.0001194992],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00006765574,0.0002923086,0.04149919,0.0004379163,0.02392965,0.0001386049,0.009458944,0.3717073,0.01282535,0.002601632,0.06196649,0.4750749],"study_design_scores_gemma":[0.0004698348,0.00006937559,0.000752041,0.00001743249,0.001855316,0.000009187269,0.00140871,0.9755808,0.01263877,0.001613656,0.005131536,0.0004533488],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9464527,0.0003037502,0.02485229,0.00005228535,0.00008042542,0.00007116255,0.000004470674,0.0002518617,0.02793102],"genre_scores_gemma":[0.9968177,0.00002621348,0.0005951962,0.00003122456,0.0000494075,0.00000193057,0.00003376329,0.00001390935,0.002430673],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.6038735,"threshold_uncertainty_score":0.3959823,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0171736354947078,"score_gpt":0.2479881335531375,"score_spread":0.2308144980584297,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}