{"id":"W2899782142","doi":"10.1038/s41598-018-34257-2","title":"Coherent Tabletop EUV Ptychography of Nanopatterns","year":2018,"lang":"en","type":"article","venue":"Scientific Reports","topic":"Advanced X-ray Imaging Techniques","field":"Physics and Astronomy","cited_by":16,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"","keywords":"Coherent diffraction imaging; Ptychography; Optics; Extreme ultraviolet lithography; Extreme ultraviolet; Phase retrieval; Diffraction; Beamline; Physics; Microscopy; Optoelectronics; Beam (structure); Laser","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004261817,0.0001224805,0.0001685152,0.0001427012,0.0001608683,0.00007996213,0.000165979,0.00001861243,0.0006905572],"category_scores_gemma":[0.00001045828,0.0001110679,0.0001036572,0.0004279272,0.0004683872,0.0001690743,0.0000899285,0.00007253447,0.00002042985],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001197345,"about_ca_system_score_gemma":0.00005810017,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000711024,"about_ca_topic_score_gemma":0.000003874686,"domain_scores_codex":[0.9985668,0.00001881366,0.0003817882,0.0004805985,0.0002935561,0.0002584659],"domain_scores_gemma":[0.9983817,0.00001104919,0.0003509042,0.0008876618,0.0002990951,0.00006959646],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"observational","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000007561651,0.0003181577,0.4951922,0.00002738145,0.00006484476,0.00002979567,0.0006172916,0.000007021034,0.4140885,0.002830612,0.05916269,0.02765397],"study_design_scores_gemma":[0.00007588944,0.00003896169,0.001971387,0.00006265109,0.00001620995,0.000008143144,0.00007751194,0.00002811855,0.7991873,0.09537032,0.1029812,0.0001822649],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9127327,0.00003942609,0.0592488,0.00005761279,0.004721058,0.0003575752,0.00001318068,0.0001658641,0.02266375],"genre_scores_gemma":[0.9909917,1.954412e-7,0.00703356,0.00001206664,0.0001607126,0.0000229183,0.0000266665,0.00001514444,0.001737],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4932208,"threshold_uncertainty_score":0.7561117,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009393572200385773,"score_gpt":0.2728079521408449,"score_spread":0.2634143799404591,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}