{"id":"W2902494082","doi":"10.22215/etd/2018-12622","title":"Fabrication of Long Range Surface Plasmon Polariton Biosensors Incorporating a Channel Etch Stop Layer and Wafer Bonded Cover","year":2018,"lang":"en","type":"dissertation","venue":"","topic":"Plasmonic and Surface Plasmon Research","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"University of Ottawa","keywords":"Photoresist; Materials science; Wafer; Fabrication; Etching (microfabrication); Optoelectronics; Layer (electronics); Wafer bonding; Anodic bonding; Silicon; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001966822,0.0003522263,0.0003450431,0.0002127141,0.0002497728,0.0004129235,0.0004413572,0.0004177028,0.0009394648],"category_scores_gemma":[0.0001916497,0.0002965847,0.000283796,0.0001376961,0.0001853137,0.0003433841,0.0003585845,0.0005775203,0.0007155607],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003111345,"about_ca_system_score_gemma":0.0004204997,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002253211,"about_ca_topic_score_gemma":0.000479658,"domain_scores_codex":[0.9998437,0.000009749953,0.000007307923,0.00004224142,0.00007513024,0.00002189628],"domain_scores_gemma":[0.9998925,0.00002565341,0.00002505554,0.00001325129,0.00002569182,0.00001781215],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008598158,0.00001246754,0.00007586311,0.00002940005,0.000002317728,0.00002427294,0.00001829675,0.00005229647,0.9973655,0.0001388852,0.00004555836,0.002226643],"study_design_scores_gemma":[0.000002905441,0.00007276284,0.0006298988,0.000003366298,0.000004037334,0.00006848917,0.0000147024,0.0005349232,0.9966382,0.00003820156,0.001987961,0.000004659542],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9287817,0.001729183,0.06135752,0.0003637967,0.0001983838,0.0002706753,0.0005448397,0.0004690948,0.00628481],"genre_scores_gemma":[0.7431486,0.002682462,0.2351308,0.000223963,0.00005036423,0.0004192344,0.0008950085,0.00009530028,0.01735424],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009394648,"threshold_uncertainty_score":0.003142774,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01861492163467121,"score_gpt":0.2575301848129152,"score_spread":0.238915263178244,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}