{"id":"W2904085559","doi":"10.1109/antem.2018.8572954","title":"Modeling of Frequency Shift in RF-MEMS Switches Under Residual Stress Gradient","year":2018,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Residual stress; Microelectromechanical systems; Finite element method; Radio frequency; Materials science; Curvature; Stress (linguistics); Residual; Mechanics; Acoustics; Electronic engineering; Structural engineering; Electrical engineering; Optoelectronics; Engineering; Computer science; Physics; Composite material; Mathematics; Geometry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001193667,0.0002535351,0.0002154084,0.0001262075,0.0001365056,0.0002875608,0.0004405053,0.0007300336,0.0006445791],"category_scores_gemma":[0.0002573527,0.0001898826,0.0002972826,0.0001208507,0.0002940723,0.0003051568,0.0001733857,0.0002086323,0.000225877],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003329812,"about_ca_system_score_gemma":0.0002446374,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002165286,"about_ca_topic_score_gemma":0.001287861,"domain_scores_codex":[0.9999133,0.00001278557,0.000003041858,0.00001798441,0.00003854523,0.00001423973],"domain_scores_gemma":[0.9999282,0.00002507867,0.00001390761,0.00001074259,0.00001711965,0.00000482716],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00009058607,0.00003114606,0.001243291,0.00007067159,0.00001713552,0.0002622125,0.00012367,0.7957721,0.1911429,0.002734422,0.0001766969,0.008335158],"study_design_scores_gemma":[0.000003343182,0.00004510435,0.0008870498,0.000004276012,0.000005322649,0.0000472667,0.00001514221,0.9856256,0.01248105,0.0003892358,0.0004901637,0.000006395248],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7825935,0.0008753879,0.2057692,0.0002249918,0.00004229097,0.00003778813,0.0001718893,0.0004774724,0.009807434],"genre_scores_gemma":[0.991306,0.0002290682,0.005736346,0.00001319394,0.00000525425,0.00001831751,0.00004086548,0.00002787193,0.00262303],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002165286,"threshold_uncertainty_score":0.004305303,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02128980497915328,"score_gpt":0.2421489775457095,"score_spread":0.2208591725665562,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}