{"id":"W2908527898","doi":"10.1063/1.5053597","title":"Dimpled electrostatic MEMS actuators","year":2019,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"King Fahd University of Petroleum and Minerals; King Abdulaziz City for Science and Technology; Jazan University; CMC Microsystems","keywords":"Actuator; Stiction; Dimple; Intermittency; Bifurcation diagram; Chaotic; Materials science; Cascade; Mechanics; Bifurcation; Control theory (sociology); Instability; Amplitude; Microelectromechanical systems; Physics; Optoelectronics; Computer science; Optics; Engineering; Nonlinear system; Electrical engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004410175,0.0001014121,0.0002123984,0.00003865455,0.00001472054,0.00001112369,0.0001304544,0.00004349402,0.000014288],"category_scores_gemma":[0.000003330822,0.0000837091,0.00006053186,0.0001364233,0.00001389967,0.00009999974,0.00001342534,0.0002660597,0.0000350457],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004602898,"about_ca_system_score_gemma":0.00001398171,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":1.726324e-7,"about_ca_topic_score_gemma":1.702269e-7,"domain_scores_codex":[0.9994613,5.70453e-7,0.0001904461,0.00005070862,0.0001315638,0.0001653954],"domain_scores_gemma":[0.9996837,0.00003750498,0.00009467897,0.0001246901,0.00002626189,0.00003315114],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002622255,0.00002214099,0.00001968255,0.00004082106,0.00008321837,0.000003326675,0.000170545,0.03563909,0.9138479,0.00544164,0.001067881,0.0436375],"study_design_scores_gemma":[0.0008350596,0.0001476248,0.0001662149,0.00003033701,0.00003240941,0.00001236423,0.0002835506,0.00189323,0.8893458,0.08981112,0.01717603,0.0002663097],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9854115,0.00005671101,0.008724451,0.000006993097,0.0002086897,0.00008058237,0.000001030579,0.00009763394,0.005412453],"genre_scores_gemma":[0.9964111,0.0001518376,0.003250249,0.00002404191,0.0001110158,0.00000195375,6.249051e-7,0.00002536613,0.00002373619],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.08436948,"threshold_uncertainty_score":0.3413558,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00505425039021581,"score_gpt":0.2072090840736209,"score_spread":0.2021548336834051,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}