{"id":"W2909399546","doi":"10.1109/tuffc.2019.2892227","title":"870 000 <inline-formula> <tex-math notation=\"LaTeX\">$Q$ </tex-math> </inline-formula>-Factor Capacitive Lamé Mode Resonator With Gap Closing Electrodes Enabling 4.4 k<inline-formula> <tex-math notation=\"LaTeX\">$\\Omega$ </tex-math> </inline-formula> Equivalent Resistance at 50 V","year":2019,"lang":"en","type":"article","venue":"IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control","topic":"Acoustic Wave Resonator Technologies","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure","funders":"Natural Sciences and Engineering Research Council of Canada; Fonds de recherche du Québec – Nature et technologies; CMC Microsystems","keywords":"Closing (real estate); Capacitive sensing; Resonator; Q factor; Mathematics; Notation; Materials science; Electrical engineering; Optoelectronics; Arithmetic; Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003653214,0.0009647254,0.0008691762,0.0004959655,0.000388441,0.002341243,0.001403301,0.001129197,0.245716],"category_scores_gemma":[0.0009563093,0.00053783,0.0006533104,0.0006892617,0.0004840521,0.001779533,0.001090969,0.001277065,0.1500742],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0009156828,"about_ca_system_score_gemma":0.0008541445,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001320193,"about_ca_topic_score_gemma":0.001798592,"domain_scores_codex":[0.9996545,0.00002466976,0.000016183,0.0000982056,0.0001552681,0.0000510704],"domain_scores_gemma":[0.9995709,0.00009420083,0.00005273037,0.00009497777,0.0001468799,0.00004019737],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002934679,0.0002206891,0.0008438818,0.001471006,0.00009688365,0.0008046385,0.0001770478,0.01152881,0.6008466,0.02146152,0.2485622,0.1136933],"study_design_scores_gemma":[0.000109771,0.0001816014,0.001349694,0.0000967097,0.00004112507,0.0005133298,0.0001347084,0.0814032,0.3617693,0.003164191,0.5511321,0.00010439],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"other","genre_gemma":"empirical","genre_scores_codex":[0.1279646,0.003129172,0.3361943,0.004208297,0.005336574,0.0005351591,0.04057799,0.08353458,0.3985195],"genre_scores_gemma":[0.4491735,0.003296745,0.1959212,0.001484778,0.0005507343,0.0008697225,0.05103967,0.02991654,0.2677472],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.245716,"threshold_uncertainty_score":0.8220021,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01144630610110752,"score_gpt":0.2233003314452816,"score_spread":0.2118540253441741,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}