{"id":"W2912824753","doi":"10.1116/1.5054101","title":"Experiments and kinetic modeling of the ion energy distribution function at the substrate surface during magnetron sputtering of silver targets in radio frequency argon plasmas","year":2019,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Montréal","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Sputtering; Atomic physics; Argon; Ion; Plasma; Ionization; Sputter deposition; Chemistry; Kinetic energy; Analytical Chemistry (journal); Materials science; Physics; Thin film; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002074983,0.0003368902,0.0002230692,0.0002216202,0.000180297,0.0002329004,0.0004100587,0.0002921495,0.0007153568],"category_scores_gemma":[0.0004326473,0.0001369847,0.0002731604,0.0002553334,0.0001579831,0.0002393235,0.0001259037,0.0001779495,0.0001792693],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004196847,"about_ca_system_score_gemma":0.0001596435,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002036894,"about_ca_topic_score_gemma":0.0007455841,"domain_scores_codex":[0.9999087,0.000008584994,0.000003971582,0.00002521959,0.00003256469,0.0000210438],"domain_scores_gemma":[0.9998626,0.00006254711,0.00002148313,0.00001764677,0.000029792,0.000005927953],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0005712134,0.00005350077,0.007810712,0.0001427234,0.00002413208,0.0003844653,0.0002890683,0.05726597,0.9229448,0.001187069,0.0001654871,0.009160764],"study_design_scores_gemma":[0.00001763694,0.0002811823,0.01312393,0.000007656145,0.0000135398,0.0002610863,0.0001032698,0.4090145,0.5759112,0.0003099611,0.0009337343,0.00002239068],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9835683,0.0001836335,0.01445629,0.00002889132,0.000005426402,0.000012559,0.0001479962,0.0001496466,0.001447384],"genre_scores_gemma":[0.9975622,0.0001028471,0.001820068,0.000002706712,0.000001565778,0.00001071383,0.00008847877,0.00001622665,0.0003953223],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002036894,"threshold_uncertainty_score":0.004050016,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005679878717778771,"score_gpt":0.1807784526263619,"score_spread":0.1750985739085832,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}