{"id":"W2913171519","doi":"10.1016/j.snb.2019.01.097","title":"Development of a highly sensitive humidity sensor based on the capacitive micromachined ultrasonic transducer","year":2019,"lang":"en","type":"article","venue":"Sensors and Actuators B Chemical","topic":"Gas Sensing Nanomaterials and Sensors","field":"Engineering","cited_by":45,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada; China Scholarship Council","keywords":"Capacitive micromachined ultrasonic transducers; Materials science; Capacitive sensing; Ultrasonic sensor; Humidity; Relative humidity; Transducer; Microelectromechanical systems; Optoelectronics; Surface micromachining; Acoustics; Electrical engineering; Composite material; Piezoelectricity; Fabrication","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004434346,0.0004391569,0.0005217178,0.0003155422,0.0001863924,0.0003565268,0.001154225,0.0008276204,0.001176433],"category_scores_gemma":[0.0005715047,0.0005007173,0.0002978906,0.0003186982,0.000278654,0.0008035701,0.0004271246,0.0008282236,0.0006100711],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002896247,"about_ca_system_score_gemma":0.0004232395,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004756484,"about_ca_topic_score_gemma":0.001037415,"domain_scores_codex":[0.9994919,0.00002923194,0.00002906884,0.0001316593,0.0002796303,0.00003849321],"domain_scores_gemma":[0.9997382,0.00005932596,0.000041851,0.0000261814,0.00009045439,0.00004408298],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009821646,0.00001300859,0.00007362996,0.00005090266,0.000003997757,0.00002718695,0.00001060979,0.00006921151,0.9950818,0.0001564353,0.00008881825,0.00441449],"study_design_scores_gemma":[0.000006958972,0.0001237005,0.0004513755,0.000002791499,0.000008528954,0.0001679459,0.000007226269,0.00211618,0.9942678,0.00002270578,0.002814723,0.000009943145],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5233046,0.007346037,0.4546089,0.001265898,0.001675834,0.000688299,0.0007515426,0.002164269,0.008194558],"genre_scores_gemma":[0.6732308,0.00249562,0.314127,0.000431618,0.0002008363,0.0001831006,0.0005546531,0.0001018269,0.008674625],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001176433,"threshold_uncertainty_score":0.003935635,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00678605032622854,"score_gpt":0.1801926043964162,"score_spread":0.1734065540701877,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}