{"id":"W2913489837","doi":"10.1002/9783527622573.ch10","title":"RF Applications","year":2008,"lang":"en","type":"other","venue":"Advanced micro & nanosystems","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Saskatchewan","funders":"","keywords":"LIGA; Microelectromechanical systems; Radio frequency; Sample (material); Engineering; Materials science; Computer science; Nanotechnology; Physics; Electrical engineering; Medicine; Fabrication","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003567182,0.001138643,0.0005899483,0.001015678,0.000846212,0.001843487,0.001133256,0.001399079,0.2895277],"category_scores_gemma":[0.000569565,0.0003092327,0.0004456966,0.0007339578,0.0002631972,0.001348781,0.001378366,0.0009570363,0.3377518],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003633875,"about_ca_system_score_gemma":0.0003729972,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000371307,"about_ca_topic_score_gemma":0.0006827039,"domain_scores_codex":[0.9995849,0.00002521193,0.00001660378,0.00007604091,0.0002436723,0.0000536615],"domain_scores_gemma":[0.9997572,0.00002621265,0.00001310886,0.00005700047,0.0001165981,0.00002990175],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"not_applicable","study_design_scores_codex":[0.000116841,0.0000818852,0.0002511887,0.0005919758,0.00001576596,0.0002746466,0.0001049247,0.000352224,0.05158635,0.01659631,0.4721127,0.4579153],"study_design_scores_gemma":[0.000009535665,0.00003185544,0.0001877247,0.00005809304,0.000007431393,0.0002735437,0.00002512915,0.0002379744,0.006953484,0.001364324,0.9908422,0.000008623922],"study_design_candidate":"not_applicable","study_design_consensus":"not_applicable","genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.002999404,0.009929911,0.02832449,0.001628724,0.005969654,0.0002398302,0.002247057,0.005052064,0.9436088],"genre_scores_gemma":[0.01015637,0.004344556,0.006617099,0.001131381,0.0009240839,0.0001317117,0.002340375,0.000580833,0.9737737],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.2895277,"threshold_uncertainty_score":0.9685667,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005060133344373462,"score_gpt":0.2043583448521991,"score_spread":0.1992982115078256,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}