{"id":"W2914611278","doi":"10.1016/j.micron.2019.02.003","title":"Electron beam damage of epoxy resin films studied by scanning transmission X-ray spectromicroscopy","year":2019,"lang":"en","type":"article","venue":"Micron","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":16,"is_retracted":false,"has_abstract":false,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada; Ontario Centres of Excellence","keywords":"Materials science; Focused ion beam; Acceleration voltage; Electron beam-induced deposition; Scanning electron microscope; Ion beam; Transmission electron microscopy; Radiation damage; Scanning transmission electron microscopy; Energy filtered transmission electron microscopy; Beam (structure); Analytical Chemistry (journal); Ion; Optics; Optoelectronics; Electron; Composite material; Cathode ray; Nanotechnology; Chemistry; Radiation; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001381071,0.0002247464,0.0003814434,0.0001329293,0.00004568255,0.00002851467,0.0002029222,0.0001284352,0.0005018344],"category_scores_gemma":[0.000003397449,0.0002047219,0.0001267846,0.0002694503,0.00002584913,0.0001074898,0.000009968154,0.000291392,0.00006537034],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009567295,"about_ca_system_score_gemma":0.00002196669,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001422198,"about_ca_topic_score_gemma":0.00001095724,"domain_scores_codex":[0.9988776,0.00002366135,0.0003239039,0.0002559042,0.0001372588,0.0003816496],"domain_scores_gemma":[0.999541,0.00002117974,0.00005692158,0.0002808435,0.00004469049,0.00005538463],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001256212,0.00002593057,0.0002730039,0.00005748828,0.0001225035,0.000001515923,0.0004097536,0.001313888,0.9750956,0.00001570283,0.02236684,0.0003052693],"study_design_scores_gemma":[0.0003875617,0.0001036768,0.0001944361,0.00007964553,0.00006465479,0.000001329633,0.0002092138,0.001043816,0.9828222,0.00001286902,0.01484856,0.0002320851],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9926721,0.00279023,0.0007052931,0.00003969714,0.0001146923,0.0001641366,0.00002246005,0.0001048325,0.003386586],"genre_scores_gemma":[0.9973608,0.000195568,0.000492841,0.00002940394,0.0000264071,0.000003661475,0.0000848523,0.00005259695,0.001753893],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.007726611,"threshold_uncertainty_score":0.8348317,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003111066156204617,"score_gpt":0.1936404121126616,"score_spread":0.190529345956457,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}