{"id":"W2914942246","doi":"10.1116/1.5079657","title":"E-beam lithography using dry powder resist of hydrogen silsesquioxane having long shelf life","year":2019,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Hydrogen silsesquioxane; Resist; Materials science; Lithography; Silsesquioxane; Electron-beam lithography; Shelf life; Nanotechnology; Chemical engineering; Composite material; Optoelectronics; Chemistry; Polymer","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001534665,0.0004114702,0.0002345814,0.0001986856,0.0001081524,0.0002638255,0.0004060446,0.0004044959,0.00188991],"category_scores_gemma":[0.0001826788,0.0003199262,0.0002135346,0.0001515157,0.0002946356,0.0003219245,0.0002945606,0.0004119977,0.001059079],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001450739,"about_ca_system_score_gemma":0.0001135988,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002039467,"about_ca_topic_score_gemma":0.0004441375,"domain_scores_codex":[0.999843,0.00001500457,0.00001227381,0.00005898234,0.0000447386,0.00002601657],"domain_scores_gemma":[0.9998605,0.0000342192,0.00003999649,0.00003657712,0.00001855739,0.000009963731],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001095042,0.000004205589,0.00003360273,0.0000287135,0.000001542309,0.00004703472,0.000006357983,0.00002524117,0.9985496,0.000105695,0.00005195467,0.001135087],"study_design_scores_gemma":[0.00001082109,0.00007415481,0.0006713076,0.000003661347,0.000002843628,0.000218035,0.000008989464,0.0007980822,0.9964605,0.00003111457,0.001715178,0.000005338922],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8965759,0.001278644,0.09045488,0.0003022325,0.0001524829,0.0001519882,0.0006377589,0.0009027434,0.009543367],"genre_scores_gemma":[0.8661485,0.0009786198,0.1235538,0.0001115792,0.00002928386,0.0001162475,0.0003553137,0.0001279053,0.008578702],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00188991,"threshold_uncertainty_score":0.006322384,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009149802665862274,"score_gpt":0.2253779390788752,"score_spread":0.2162281364130129,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}