{"id":"W2917664173","doi":"10.1149/ma2018-02/29/951","title":"Temporary Bonding for High Temperature Processing of Thin Glass Using Plasma Activated DLC Layer","year":2018,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Research & Development Corporation","funders":"","keywords":"Materials science; Anodic bonding; Plasma-enhanced chemical vapor deposition; Thin film; Layer (electronics); Wafer; Wafer bonding; Amorphous solid; Raman spectroscopy; Composite material; Bond energy; Diamond-like carbon; Optoelectronics; Nanotechnology; Optics; Crystallography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.000535169,0.0003009472,0.0003508185,0.0001645556,0.0002332585,0.0001777977,0.0002606363,0.0002936414,0.000007670556],"category_scores_gemma":[0.0002419649,0.0002930603,0.00005153111,0.0002821444,0.00008582138,0.0005210449,0.00005754107,0.0002412232,0.000003648344],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001030746,"about_ca_system_score_gemma":0.00009018583,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00008852193,"about_ca_topic_score_gemma":0.000004733676,"domain_scores_codex":[0.9984499,0.00002394172,0.0005644151,0.0003060899,0.0002297364,0.0004259171],"domain_scores_gemma":[0.9990857,0.00009724247,0.0002792285,0.0002335062,0.0002208286,0.00008354448],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004873645,0.00002362264,0.0001630033,0.0007333934,0.00002573337,0.000004399625,0.0002638697,0.007454399,0.9903003,0.000009543877,0.0007891221,0.0001838603],"study_design_scores_gemma":[0.0003039615,0.00005313002,0.0002509324,0.001234556,0.00002784813,0.00001098306,0.00005511035,0.01157009,0.9852594,0.0005274863,0.0003836376,0.000322898],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9943424,0.00005278545,0.00007143257,0.00004899099,0.0005486193,0.0002865876,0.00002611374,0.001203818,0.003419203],"genre_scores_gemma":[0.962595,0.000001546373,0.03659774,0.00002233797,0.000560943,0.00001635125,0.00002244187,0.0001288647,0.0000547647],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0365263,"threshold_uncertainty_score":0.9999521,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02117928998292536,"score_gpt":0.2584740939646157,"score_spread":0.2372948039816903,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}