{"id":"W2921058421","doi":"10.1007/s00542-019-04377-4","title":"An evaluation of optical profilometry techniques for CMUT characterization","year":2019,"lang":"en","type":"article","venue":"Microsystem Technologies","topic":"Surface Roughness and Optical Measurements","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Windsor","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Profilometer; Characterization (materials science); Fabrication; Materials science; Optics; Interferometry; White light interferometry; Context (archaeology); Surface roughness; Surface finish; Computer science; Nanotechnology; Physics; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.004591451,0.0007982075,0.000430908,0.001500818,0.0005928964,0.0008319974,0.0009674877,0.0008706992,0.001211864],"category_scores_gemma":[0.00647405,0.000276542,0.0004146063,0.001209365,0.0004747158,0.001167759,0.0005782433,0.00038646,0.0002808765],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006545475,"about_ca_system_score_gemma":0.0007074451,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009274619,"about_ca_topic_score_gemma":0.002574006,"domain_scores_codex":[0.996007,0.001053547,0.0001403782,0.0003079002,0.002374014,0.0001170827],"domain_scores_gemma":[0.9916474,0.003657817,0.0005991901,0.0006995038,0.003264474,0.0001315755],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.001391211,0.000350082,0.00714281,0.0006710747,0.0000601923,0.00008859719,0.0002752683,0.002158071,0.8133642,0.0005784173,0.0003678731,0.1735523],"study_design_scores_gemma":[0.00005906773,0.005575507,0.0259496,0.00009251964,0.0002073082,0.0009165697,0.0003384809,0.03238054,0.9272317,0.0002291275,0.006950538,0.00006896003],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.81841,0.009286454,0.1641836,0.000248463,0.0001467849,0.0005236252,0.000423214,0.000671702,0.006106082],"genre_scores_gemma":[0.8489776,0.002703381,0.145114,0.00009534193,0.0000576995,0.000151058,0.0002034747,0.0000945702,0.002602849],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004591451,"threshold_uncertainty_score":0.02428222,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0265284983952183,"score_gpt":0.2707369670383112,"score_spread":0.2442084686430929,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}