{"id":"W2921688127","doi":"10.1364/ome.9.001728","title":"Flexible and low-cost fabrication of optical waveguides by UV laser resist-mask writing","year":2019,"lang":"en","type":"article","venue":"Optical Materials Express","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Foundation for Innovation","keywords":"Materials science; Photoresist; Optoelectronics; Laser; Optics; Silicon nitride; Waveguide; Resist; Reactive-ion etching; Silicon; Fabrication; Substrate (aquarium); Layer (electronics); Etching (microfabrication); Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001719825,0.000363932,0.0001668106,0.0001511556,0.0001790816,0.0002794304,0.0005710509,0.0001913871,0.0008944469],"category_scores_gemma":[0.0002490187,0.0003005487,0.0001856797,0.0001234812,0.0001840855,0.0002963928,0.0002534745,0.0002965536,0.0004806998],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001484948,"about_ca_system_score_gemma":0.0001821563,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002996652,"about_ca_topic_score_gemma":0.0006948023,"domain_scores_codex":[0.999826,0.00001222225,0.00001108861,0.00003651929,0.00009506998,0.0000190461],"domain_scores_gemma":[0.9998673,0.00003647217,0.00004292974,0.00002764915,0.00001665536,0.000008908879],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008719348,0.000009622323,0.0001087497,0.00003611957,0.000002122009,0.00005500496,0.00001189892,0.0001672811,0.9943221,0.0002716799,0.0001068599,0.004899914],"study_design_scores_gemma":[0.000006659974,0.00007274241,0.0007627681,0.000003943127,0.000003966322,0.0001933756,0.000006769177,0.001754281,0.9930667,0.00008501879,0.004037951,0.000005796768],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8226453,0.002076807,0.162551,0.0001835056,0.0002270164,0.000199244,0.0006457296,0.001125563,0.01034582],"genre_scores_gemma":[0.7466831,0.001242437,0.2452231,0.00005882441,0.00004616124,0.0001896001,0.0003667104,0.0001365996,0.006053424],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008944469,"threshold_uncertainty_score":0.002992272,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007572474392036751,"score_gpt":0.2211742721563631,"score_spread":0.2136017977643263,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}