{"id":"W2925080256","doi":"10.1116/1.5088974","title":"Unintentional As incorporation into AlSb and interfacial layers within InAs/AlSb superlattices","year":2019,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Spectroscopy and Laser Applications","field":"Chemistry","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Shutter; Superlattice; Molecular beam epitaxy; Flux (metallurgy); Wafer; Optoelectronics; Epitaxy; Diffraction; Quantum well; Ternary operation; Laser; Nanotechnology; Optics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0000933817,0.0001933488,0.0001974599,0.0001040668,0.0001476525,0.0003409671,0.0002480763,0.0001499979,0.0005704163],"category_scores_gemma":[0.0001897782,0.0001738081,0.0001113123,0.0001027423,0.0002041013,0.0002506569,0.0001912565,0.0001729529,0.0001239276],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002900934,"about_ca_system_score_gemma":0.0002027318,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007977586,"about_ca_topic_score_gemma":0.001375646,"domain_scores_codex":[0.9999297,0.000005300362,0.000004056069,0.00001933437,0.00002460413,0.00001713443],"domain_scores_gemma":[0.9999174,0.00001736111,0.00002732485,0.00001390287,0.00001328531,0.00001076187],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000617359,0.000008340494,0.0005224236,0.00003824102,0.000004670626,0.00004722189,0.00002856656,0.000420149,0.9980549,0.0001726916,0.00001225698,0.0006288631],"study_design_scores_gemma":[0.000008344962,0.0001238877,0.003783055,0.000005114364,0.00001288504,0.00005340997,0.00005331181,0.006456571,0.9884779,0.00007984107,0.0009391155,0.000006481912],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.999062,0.0001297409,0.0004855702,0.000008017606,0.000004781668,0.000003169388,0.00004060005,0.00002333269,0.0002428819],"genre_scores_gemma":[0.9988096,0.00008674935,0.0007404255,0.000004630289,0.000001287391,0.000005634445,0.00004415794,0.00001247843,0.0002950821],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007977586,"threshold_uncertainty_score":0.002104819,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007976349689509768,"score_gpt":0.2388774762042765,"score_spread":0.2309011265147668,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}