{"id":"W2927179777","doi":"10.31438/trf.hh2012.82","title":"FORCED OSCILLATION AND HIGHER HARMONIC DETECTION IN AN INTEGRATED CMOS-MEMS SCANNING PROBE MICROSCOPE","year":2012,"lang":"en","type":"article","venue":"","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Defense Advanced Research Projects Agency; CMC Microsystems","keywords":"Scanning thermal microscopy; Microelectromechanical systems; Non-contact atomic force microscopy; Materials science; Scanning probe microscopy; Oscillation (cell signaling); CMOS; Atomic force microscopy; Thermal; Chip; Microscope; Microscopy; Atomic force acoustic microscopy; Conductive atomic force microscopy; Optoelectronics; Optics; Nanotechnology; Magnetic force microscope; Physics; Electrical engineering; Engineering; Chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001115775,0.0001153582,0.0001008769,0.00006317914,0.0001049799,0.00006529869,0.00005520262,0.00004646007,0.0002243788],"category_scores_gemma":[6.451076e-7,0.0001025078,0.00002221015,0.0002013779,0.00003089002,0.0003596775,0.00002741106,0.0001168049,0.00001151283],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003952699,"about_ca_system_score_gemma":0.00001229163,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000952235,"about_ca_topic_score_gemma":0.00003873032,"domain_scores_codex":[0.9993721,0.00001556161,0.0001643495,0.0001708568,0.00004364784,0.0002335183],"domain_scores_gemma":[0.9997036,0.000007699899,0.00005497953,0.0001333489,0.00003182087,0.00006850294],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009716832,0.00007390001,0.07799789,0.000005338358,0.000005784204,2.442268e-8,0.0002268642,0.000006416029,0.8756568,0.006346418,0.00008908188,0.03958171],"study_design_scores_gemma":[0.0006177296,0.0001089054,0.07934231,0.00004656599,0.00001980427,0.00000107974,0.000529307,0.002232034,0.8935422,0.001334162,0.02180444,0.0004214172],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9115214,0.00003490731,0.08500371,0.00004700046,0.00004985159,0.0003449053,0.000006263411,0.00008684461,0.002905097],"genre_scores_gemma":[0.992435,0.000001538763,0.006402226,0.00003279727,0.00009321903,0.0001034795,0.00005124572,0.00001752344,0.0008629345],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.08091362,"threshold_uncertainty_score":0.4180147,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01520316336861027,"score_gpt":0.2855503713097153,"score_spread":0.270347207941105,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}