{"id":"W2931336337","doi":"10.31438/trf.hh2016.59","title":"A HIGHLY SENSITIVE SMALL-FOOTPRINT VOX-BASED MICRO-PIRANI GAUGE FOR IN-SITU MONITORING OF VACUUM WAFER-LEVEL PACKAGED BOLOMETERS","year":2016,"lang":"en","type":"article","venue":"2016 Solid-State, Actuators, and Microsystems Workshop Technical Digest","topic":"Transition Metal Oxide Nanomaterials","field":"Materials Science","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalsa Corporation; Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada; Mitacs","keywords":"Wafer; Bolometer; Materials science; Wafer-level packaging; Footprint; Optoelectronics; Spark plug; Leak; Temperature measurement; Torr; Electrical engineering; Mechanical engineering; Engineering; Physics; Detector","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.002029507,0.0006780847,0.0014017,0.0004332627,0.0001864076,0.0001889444,0.0005223964,0.0004617318,0.00001028013],"category_scores_gemma":[0.000365978,0.0004986485,0.0003071838,0.0003483519,0.000486083,0.0002929216,0.000197488,0.0002000266,0.00004437719],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003200778,"about_ca_system_score_gemma":0.0002292516,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001369112,"about_ca_topic_score_gemma":0.0002039235,"domain_scores_codex":[0.9953256,0.0004081425,0.001685632,0.001104366,0.0003642413,0.001112065],"domain_scores_gemma":[0.9963618,0.00154933,0.0006475034,0.0007564857,0.0003248734,0.0003600162],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0006694821,0.0002000851,0.0008442111,0.0003336225,0.00003634478,0.0000278097,0.0002462379,0.000002552476,0.9951645,0.00007306075,0.00008919592,0.002312891],"study_design_scores_gemma":[0.003082212,0.000205741,0.01023847,0.001936458,0.00005652736,0.00003469404,0.0001300336,0.000001127535,0.9829131,0.0002098792,0.0005125511,0.0006791469],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9622501,0.0002173882,0.03258991,0.0002989995,0.001125283,0.001738743,0.001467742,0.0002807052,0.00003118781],"genre_scores_gemma":[0.9916609,0.0001189133,0.007309472,0.00005948281,0.0001647648,0.0002493554,0.00002563714,0.0001181835,0.0002932876],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02941086,"threshold_uncertainty_score":0.9997465,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02778525885514271,"score_gpt":0.2677423647492602,"score_spread":0.2399571058941175,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}