{"id":"W2934303504","doi":"10.31438/trf.hh2008.47","title":"INTEGRATED TESTING OF POLYMER MEMS MATERIAL PROPERTIES","year":2008,"lang":"en","type":"article","venue":"2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Fabrication; Microelectromechanical systems; Materials science; Actuator; Vibration; Substrate (aquarium); Modulus; Material properties; Piezoelectricity; Optoelectronics; Acoustics; Computer science; Composite material; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005442249,0.0006189452,0.0003010336,0.0006302386,0.0002277402,0.0003458773,0.0006352091,0.0004535055,0.00215059],"category_scores_gemma":[0.001142257,0.0003343034,0.000196192,0.0003339715,0.0002733891,0.0008231594,0.0005979488,0.0004620934,0.00048579],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002984648,"about_ca_system_score_gemma":0.0002238289,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002329015,"about_ca_topic_score_gemma":0.000451517,"domain_scores_codex":[0.9988758,0.00008483468,0.00004615,0.0002383692,0.0006564579,0.00009837665],"domain_scores_gemma":[0.9989587,0.0003306445,0.0002208564,0.0001680794,0.0002550857,0.00006657481],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005244325,0.00002747309,0.0005049715,0.00001695293,0.000005142716,0.00002954632,0.00001250853,0.0002102904,0.9937139,0.00007096742,0.00002449611,0.005331281],"study_design_scores_gemma":[0.000007534212,0.0003625111,0.002219556,0.00000211018,0.000008303733,0.00006662575,0.000006774841,0.002592586,0.9941251,0.00003996255,0.0005618114,0.000007038099],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9512424,0.0005159088,0.04318599,0.00004350961,0.00006398354,0.00009251181,0.0002523847,0.0006712035,0.003932144],"genre_scores_gemma":[0.9606356,0.0002308959,0.03626502,0.00004690791,0.00001974898,0.000133254,0.000186542,0.0000792914,0.002402787],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00215059,"threshold_uncertainty_score":0.007194459,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02138535913703907,"score_gpt":0.2223521818311216,"score_spread":0.2009668226940825,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}