{"id":"W2935490272","doi":"10.31438/trf.hh2014.94","title":"POROUS SILICON CARBIDE : A NEW THERMAL INSULATION MATERIAL FOR HARSH ENVIRONMENT MEMS","year":2014,"lang":"en","type":"article","venue":"2014 Solid-State, Actuators, and Microsystems Workshop Technical Digest","topic":"Silicon Nanostructures and Photoluminescence","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada; Fonds Québécois de la Recherche sur la Nature et les Technologies","keywords":"Materials science; Silicon carbide; Microelectromechanical systems; Fabrication; Thermal conductivity; Microfabrication; Etching (microfabrication); Composite material; Porous silicon; Thermal insulation; Porosity; Isotropic etching; Silicon; Thermal; Porous medium; Optoelectronics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0006149831,0.0004933308,0.0006870381,0.00009323769,0.0003114081,0.0004112823,0.0004637854,0.0003628506,0.000158026],"category_scores_gemma":[0.0001384236,0.0004188778,0.0001383283,0.00009598264,0.0002420802,0.0002786104,0.000239119,0.000191805,0.00006863267],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001112354,"about_ca_system_score_gemma":0.00008821108,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007841648,"about_ca_topic_score_gemma":0.0001451337,"domain_scores_codex":[0.9971112,0.0001085785,0.000819169,0.0008734376,0.0003181612,0.0007694557],"domain_scores_gemma":[0.9982027,0.0002994253,0.0003794663,0.0006788617,0.00005554123,0.0003839501],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002043103,0.00005187684,0.0006990745,0.00008579712,0.00001183075,0.000002645413,0.0002586653,0.00004462845,0.9919828,0.0001214308,0.002754534,0.003782361],"study_design_scores_gemma":[0.001722609,0.000310655,0.009359321,0.0001970137,0.00006509309,0.00009999735,0.00005561909,0.0001863852,0.9464141,0.0007084672,0.03995227,0.0009284987],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9945419,0.0002721731,0.001858835,0.0001373615,0.001256455,0.001299836,0.0002795905,0.0002463525,0.0001074933],"genre_scores_gemma":[0.9977408,0.00009656302,0.0003352919,0.0002039795,0.0006400992,0.0001275688,0.0001060926,0.00008042995,0.0006691666],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04556877,"threshold_uncertainty_score":0.9998263,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007934134009017721,"score_gpt":0.2321968177606968,"score_spread":0.2242626837516791,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}