{"id":"W2935490272","doi":"10.31438/trf.hh2014.94","title":"POROUS SILICON CARBIDE : A NEW THERMAL INSULATION MATERIAL FOR HARSH ENVIRONMENT MEMS","year":2014,"lang":"en","type":"article","venue":"2014 Solid-State, Actuators, and Microsystems Workshop Technical Digest","topic":"Silicon Nanostructures and Photoluminescence","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada; Fonds Québécois de la Recherche sur la Nature et les Technologies","keywords":"Materials science; Silicon carbide; Microelectromechanical systems; Fabrication; Thermal conductivity; Microfabrication; Etching (microfabrication); Composite material; Porous silicon; Thermal insulation; Porosity; Isotropic etching; Silicon; Thermal; Porous medium; Optoelectronics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001628271,0.0001887669,0.0001459668,0.0003179625,0.0001472502,0.0003568483,0.0002418389,0.0003277302,0.0004482107],"category_scores_gemma":[0.0001680058,0.0001254012,0.0001698578,0.0001677994,0.0003021899,0.0003280162,0.0002050542,0.0002807897,0.0001610979],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001754429,"about_ca_system_score_gemma":0.0001878219,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002792067,"about_ca_topic_score_gemma":0.0006250434,"domain_scores_codex":[0.9998698,0.000007503393,0.000007376314,0.0000226466,0.00007341088,0.0000192232],"domain_scores_gemma":[0.9998971,0.00002427755,0.00002544989,0.00001017015,0.00002113372,0.00002177984],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002191444,0.00000960028,0.000235589,0.0001063008,0.000006600813,0.0001184912,0.0000139309,0.0003807335,0.9921313,0.0002841759,0.0001311657,0.006560129],"study_design_scores_gemma":[0.000009445318,0.0001450802,0.001854085,0.000009595735,0.00001800802,0.000744489,0.00001338365,0.002209793,0.987461,0.00008692183,0.00743718,0.00001097053],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9059749,0.01490724,0.0671046,0.0003743543,0.0002792166,0.0000854145,0.000369733,0.0006638428,0.0102407],"genre_scores_gemma":[0.9677338,0.002265359,0.02801093,0.00007709899,0.00006208539,0.00001959425,0.0001605486,0.00004004244,0.001630494],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0004482107,"threshold_uncertainty_score":0.001499355,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007934134009017721,"score_gpt":0.2321968177606968,"score_spread":0.2242626837516791,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}