{"id":"W2939260271","doi":"10.1088/1361-6528/ab180c","title":"Process-dependent mechanical and optical properties of nanostructured silicon carbonitride thin films","year":2019,"lang":"en","type":"article","venue":"Nanotechnology","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":16,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University; McMaster University; University of New Brunswick","funders":"Natural Sciences and Engineering Research Council of Canada; Polytechnique Montréal; McMaster University","keywords":"Materials science; Elastic recoil detection; Thin film; Carbon film; Analytical Chemistry (journal); Chemical vapor deposition; Amorphous solid; Silicon; Silane; X-ray photoelectron spectroscopy; Raman spectroscopy; Amorphous carbon; Crystallography; Composite material; Nanotechnology; Chemical engineering; Optics; Metallurgy; Organic chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003683875,0.0001709619,0.0004074274,0.0001385416,0.00004390757,0.00003866767,0.0003708402,0.0004229755,0.0003302994],"category_scores_gemma":[0.0002645287,0.0001279572,0.00003692137,0.000140993,0.0003218844,0.00008911573,0.0002451026,0.0002111677,0.00006517571],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002091966,"about_ca_system_score_gemma":0.0001354193,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00008328781,"about_ca_topic_score_gemma":0.00001016741,"domain_scores_codex":[0.9983807,0.00006160019,0.0003299963,0.0004415406,0.0003707187,0.0004154298],"domain_scores_gemma":[0.9992998,0.00003769544,0.00009461035,0.0003892395,0.0001086067,0.00007007462],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001608125,0.00004157833,0.00009606565,0.0001675993,0.000006669392,0.000007710734,0.00005199603,0.00001431012,0.995586,0.003071737,0.000006860852,0.0007886909],"study_design_scores_gemma":[0.0005598843,0.0003040951,0.00003896375,0.00005366218,0.00001085764,0.00002855464,0.0002003724,0.0002966693,0.9955453,0.002770846,0.00004059572,0.0001501761],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9981314,0.0003360597,0.000008611185,0.000375258,0.0003725369,0.0003938533,0.0000164892,0.0001490138,0.0002167904],"genre_scores_gemma":[0.9994364,0.00003184579,0.0002726545,0.00005205581,0.00001897423,0.00004009338,0.00000161498,0.00002061669,0.0001257779],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001304979,"threshold_uncertainty_score":0.5217944,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00982621341499479,"score_gpt":0.2372336627799471,"score_spread":0.2274074493649524,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}