{"id":"W2939688150","doi":"","title":"Nanoscale damascene processes for patterning and devices fabrication","year":2017,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Fabrication; Nanoscopic scale; Nanotechnology; Materials science; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002885239,0.0007426582,0.0004584759,0.0006910774,0.0006889458,0.001192108,0.0006748906,0.00088685,0.01229092],"category_scores_gemma":[0.0005533775,0.0004907444,0.0002882627,0.0006267459,0.0005629661,0.001586824,0.0009496355,0.001194149,0.003052568],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00101983,"about_ca_system_score_gemma":0.0004398779,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005040397,"about_ca_topic_score_gemma":0.001205591,"domain_scores_codex":[0.999451,0.00002360598,0.00001860688,0.0001172378,0.000331542,0.0000579876],"domain_scores_gemma":[0.9997329,0.00009016401,0.00003168262,0.00007726949,0.00004865566,0.00001935259],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004229554,0.00003079094,0.00008974578,0.0003386218,0.000008625356,0.0001104418,0.00007877431,0.0005074504,0.9617902,0.01984413,0.002090534,0.01506843],"study_design_scores_gemma":[0.00001238025,0.00007169581,0.0006326207,0.00003389982,0.000009857717,0.0002621881,0.00003543018,0.005215063,0.9056799,0.00435925,0.08366317,0.00002461661],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.3743075,0.04524322,0.3034532,0.006158496,0.004787417,0.0008402177,0.004249396,0.003795228,0.2571653],"genre_scores_gemma":[0.6773276,0.02507345,0.1560505,0.0006191537,0.0008686526,0.0004087219,0.002349638,0.0008805178,0.1364218],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01229092,"threshold_uncertainty_score":0.04111725,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01425955794298459,"score_gpt":0.2362516807374179,"score_spread":0.2219921227944333,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}