{"id":"W2941700730","doi":"10.1021/acsami.9b02079","title":"Photo-Atomic Layer Etching of GaAs/AlGaAs Nanoheterostructures","year":2019,"lang":"en","type":"article","venue":"ACS Applied Materials & Interfaces","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":22,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Materials science; Etching (microfabrication); Photoluminescence; Dissolution; Aqueous solution; Layer (electronics); Inductively coupled plasma; Analytical Chemistry (journal); Optoelectronics; Semiconductor; X-ray photoelectron spectroscopy; Chemical engineering; Nanotechnology; Plasma; Chemistry; Physical chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow","insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.0001841615,0.0003284238,0.0005877197,0.00009876397,0.00002989371,0.0001571714,0.0003777245,0.0001679132,0.002662225],"category_scores_gemma":[0.000005490685,0.0002836817,0.00002364304,0.00006654624,0.00004428247,0.0001706536,0.00012415,0.00008647909,0.0003598178],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003065371,"about_ca_system_score_gemma":0.00001074586,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00008126935,"about_ca_topic_score_gemma":0.000005507213,"domain_scores_codex":[0.9985876,0.00002459975,0.000564184,0.0003011947,0.000179043,0.0003433673],"domain_scores_gemma":[0.9993169,0.00004689114,0.0001536348,0.0004118205,0.00002793423,0.00004277371],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006417814,0.000008276378,0.00004438144,0.0003702473,0.00007419542,6.905219e-7,0.0004590847,0.0004153321,0.9977062,0.0004816443,0.0002577073,0.0001179986],"study_design_scores_gemma":[0.0003800764,0.00003009778,0.0002633132,0.00008356181,0.00002200353,0.000006307849,0.0001838698,0.000004862016,0.9975964,0.0007870822,0.0003330646,0.0003092894],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9934852,0.0002650448,0.000004288467,0.000005284219,0.002541737,0.0003594176,0.0001014587,0.000276593,0.002961002],"genre_scores_gemma":[0.9993359,0.00006775945,0.0002096746,0.00006823875,0.0001345819,0.00003226975,0.00002368843,0.00008231455,0.00004551284],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.005850786,"threshold_uncertainty_score":0.9999616,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007690429845450136,"score_gpt":0.2075815562347604,"score_spread":0.1998911263893103,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}