{"id":"W2943293991","doi":"10.1007/s10854-019-01319-8","title":"Structural and physical properties of NbO2 and Nb2O5 thin films prepared by magnetron sputtering","year":2019,"lang":"en","type":"article","venue":"Journal of Materials Science Materials in Electronics","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":56,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Saskatchewan","funders":"Natural Sciences and Engineering Research Council of Canada; Silicon Valley Community Foundation","keywords":"Materials science; Thin film; Sputter deposition; Crystallinity; Analytical Chemistry (journal); Crystallite; Sputtering; Nanoindentation; Raman spectroscopy; Transmittance; Composite material; Optoelectronics; Optics; Nanotechnology; Metallurgy","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001042985,0.0001969672,0.0001857567,0.0003150699,0.0002549515,0.0002369493,0.0002499858,0.0002616699,0.002248458],"category_scores_gemma":[0.0002820432,0.000204026,0.0001294547,0.0002683234,0.0001968309,0.0002001682,0.00009669062,0.0002175544,0.0001787873],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002143481,"about_ca_system_score_gemma":0.0001588153,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.004487209,"about_ca_topic_score_gemma":0.005351983,"domain_scores_codex":[0.9999228,0.000004108739,0.000005168461,0.00001374767,0.00003376037,0.00002049122],"domain_scores_gemma":[0.9998981,0.00002546003,0.00001821045,0.000007707105,0.00003081719,0.00001966517],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001830991,0.00001125182,0.0006078501,0.00004559002,0.000008284163,0.00006985354,0.00003245927,0.0001008329,0.9981928,0.00006900853,0.00008807061,0.0005907661],"study_design_scores_gemma":[0.00003351198,0.0001694038,0.03123252,0.00001178137,0.00003066464,0.000141378,0.0001903006,0.002628684,0.9642349,0.00004038644,0.00127431,0.00001217508],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9978782,0.0003172233,0.0001637103,0.00003026445,0.00001388737,0.000004543541,0.0002829318,0.00001015517,0.001299001],"genre_scores_gemma":[0.9977457,0.0001828325,0.0003860052,0.00001571168,0.000006076195,0.000008560037,0.0003923996,0.000009765116,0.001253072],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004487209,"threshold_uncertainty_score":0.008922219,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006956935054318747,"score_gpt":0.2099791884367952,"score_spread":0.2030222533824765,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}