{"id":"W2944007095","doi":"10.3791/59415","title":"Plasma-Assisted Molecular Beam Epitaxy Growth of Mg<sub>3</sub>N<sub>2</sub> and Zn<sub>3</sub>N<sub>2</sub> Thin Films","year":2019,"lang":"en","type":"article","venue":"Journal of Visualized Experiments","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Victoria","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Molecular beam epitaxy; Analytical Chemistry (journal); Reflection high-energy electron diffraction; Materials science; Substrate (aquarium); Refractive index; Electron diffraction; Epitaxy; Thin film; Optics; Chemistry; Diffraction; Optoelectronics; Nanotechnology; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001070759,0.0004098766,0.0002660197,0.0001687152,0.000184249,0.0001894445,0.0003861199,0.0002194755,0.0009017371],"category_scores_gemma":[0.000168461,0.0002349144,0.0001440431,0.0003602408,0.00007796391,0.0001580309,0.0001886483,0.0002588274,0.0003786579],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003345837,"about_ca_system_score_gemma":0.0002246381,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002276651,"about_ca_topic_score_gemma":0.006703301,"domain_scores_codex":[0.9999061,0.000006756374,0.00000586709,0.00002667772,0.0000413714,0.00001330169],"domain_scores_gemma":[0.9999529,0.000007057894,0.00001036089,0.00001016287,0.0000144131,0.000005049536],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001233949,0.000003444064,0.00005555438,0.00002588017,0.000002051015,0.00002363411,0.000007711384,0.00006391338,0.9989049,0.0000682372,0.00006395637,0.0007682958],"study_design_scores_gemma":[0.000009484011,0.00003316523,0.001538454,0.000003623013,0.00000498866,0.00008249377,0.000006571531,0.001450679,0.9923972,0.00002026305,0.004449162,0.000003928481],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9702129,0.001702154,0.01882647,0.0001197703,0.00009467458,0.0001872029,0.002068978,0.0003703278,0.006417548],"genre_scores_gemma":[0.9252496,0.002165436,0.06070691,0.00004144693,0.0000235893,0.0002477154,0.001641064,0.0001352874,0.009788891],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002276651,"threshold_uncertainty_score":0.004526794,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01537639098347649,"score_gpt":0.2941902269573537,"score_spread":0.2788138359738772,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}