{"id":"W2953268685","doi":"10.1002/masy.200450511","title":"Synthesis and lithographic applications of highly metallized cluster‐based polyferrocenylsilanes","year":2004,"lang":"en","type":"article","venue":"Macromolecular Symposia","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Materials science; Resist; Reactive-ion etching; Etching (microfabrication); Ferromagnetism; Electron-beam lithography; Lithography; Ceramic; Cobalt; Photolithography; Pyrolytic carbon; Nanoparticle; Dry etching; Nanotechnology; Optoelectronics; Pyrolysis; Chemical engineering; Composite material; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001174377,0.0003235993,0.00009000378,0.0002193916,0.0002118389,0.0002019414,0.0001970418,0.0002089624,0.001297357],"category_scores_gemma":[0.0001720148,0.0001776996,0.0001827074,0.0001254931,0.0002241944,0.0002021184,0.000168033,0.0001944841,0.0003202287],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002717167,"about_ca_system_score_gemma":0.0001356594,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003344243,"about_ca_topic_score_gemma":0.0006762278,"domain_scores_codex":[0.9999242,0.000007090837,0.000006083252,0.0000190085,0.00002528469,0.00001830287],"domain_scores_gemma":[0.9998674,0.00003342987,0.00004286851,0.00002358354,0.00001601248,0.0000166938],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002491449,0.000006740974,0.00005616367,0.00004098725,0.000001877454,0.0000980597,0.00001472086,0.0001309569,0.9969878,0.0001498785,0.00004153265,0.00244631],"study_design_scores_gemma":[0.000005985918,0.00006817529,0.0003892746,0.000001565662,0.000002611824,0.0001133532,0.000005932615,0.0002442496,0.9978464,0.00002209569,0.001298026,0.000002398617],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9693298,0.002229218,0.0204681,0.0001884505,0.0001034778,0.00008884149,0.0002267766,0.0004152347,0.006950171],"genre_scores_gemma":[0.9769414,0.0008052137,0.01974194,0.00003382639,0.00002629542,0.00002498229,0.0001207982,0.00002845068,0.002277202],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001297357,"threshold_uncertainty_score":0.004340112,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005219152369602254,"score_gpt":0.2234853755726915,"score_spread":0.2182662232030893,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}