{"id":"W2954108375","doi":"10.31399/asm.cp.istfa2018p0232","title":"Integration of Probing Capability into Plasma FIB for In-Situ Delayering, Defect Inspection, and EBAC on BEOL Defects of Sub-20nm FinFET Devices","year":2018,"lang":"en","type":"article","venue":"Proceedings - International Symposium for Testing and Failure Analysis","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Materials science; Chemical-mechanical planarization; Polishing; Plasma; Integrated circuit; Controllability; Optoelectronics; Nanotechnology; Focused ion beam; Process (computing); Computer science; Ion; Chemistry; Physics; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001709848,0.0002085148,0.0001817568,0.0001827895,0.0001636829,0.0002196751,0.0003350929,0.0002784873,0.0006662358],"category_scores_gemma":[0.0003467673,0.0001659981,0.00009629295,0.00008484777,0.0002072336,0.0002680892,0.0002332861,0.0001611449,0.0001167946],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001591937,"about_ca_system_score_gemma":0.0001223092,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005799679,"about_ca_topic_score_gemma":0.001092804,"domain_scores_codex":[0.9999148,0.000009325007,0.000004137773,0.00001931109,0.00003477484,0.0000176635],"domain_scores_gemma":[0.9997258,0.0000905533,0.00004253589,0.00005042387,0.00007414098,0.00001663126],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004552269,0.00001194417,0.000449083,0.00002271616,0.000002294214,0.00007866629,0.00008025763,0.0001826201,0.9961932,0.00008827641,0.00004107619,0.002804508],"study_design_scores_gemma":[0.000005697176,0.0002131106,0.002539909,0.00000259464,0.000005142176,0.0001694003,0.00003594602,0.003889439,0.9925376,0.00002605621,0.0005698899,0.000005317837],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9911645,0.0001425973,0.007699668,0.00003549426,0.00001263609,0.00001796507,0.00004823211,0.0002184875,0.0006605343],"genre_scores_gemma":[0.9869703,0.00009102189,0.01204887,0.00001709807,0.000002922539,0.00001500606,0.00005016516,0.00002719446,0.0007774],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006662358,"threshold_uncertainty_score":0.002228737,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01191165191663113,"score_gpt":0.2326723709529978,"score_spread":0.2207607190363666,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}