{"id":"W2957034537","doi":"10.18280/i2m.180110","title":"Microstructure Size Measurement Based on C-scan Image of Scanning Acoustic Microscopy","year":2019,"lang":"en","type":"article","venue":"Instrumentation Mesure Métrologie","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"National Natural Science Foundation of China","keywords":"Scanning acoustic microscope; Materials science; Acoustic microscopy; Resolution (logic); Microscopy; Wafer; Scanning electron microscope; Scanning probe microscopy; Scanning ion-conductance microscopy; Transducer; Optics; Scanning confocal electron microscopy; Acoustics; Optoelectronics; Physics; Computer science; Artificial intelligence; Composite material","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003244382,0.0002701656,0.0003544093,0.0001823748,0.00004883103,0.00005082482,0.0002217414,0.0001600887,0.0006405521],"category_scores_gemma":[0.0000826583,0.000238897,0.0001503487,0.0003106111,0.00005340685,0.0001388576,0.00001001708,0.0002772094,0.0000501245],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002553517,"about_ca_system_score_gemma":0.00007986138,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003993473,"about_ca_topic_score_gemma":0.00002355948,"domain_scores_codex":[0.9984747,0.00006811947,0.0004133332,0.0002807738,0.0004426005,0.0003205435],"domain_scores_gemma":[0.9991785,0.00008252033,0.0001221512,0.0003459467,0.0002115178,0.00005935917],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003809096,0.00001848287,0.006789358,0.00007732793,0.0001181342,0.000002216227,0.0001358093,0.06761135,0.923236,0.00001986001,0.0009000207,0.001053344],"study_design_scores_gemma":[0.001952301,0.0003291489,0.01807911,0.0001451829,0.0002206476,0.000004036186,0.000820838,0.03282982,0.9445376,0.0001464671,0.0004404683,0.0004943451],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9939467,0.00009240474,0.002476744,0.0001130751,0.0006440736,0.000286096,0.00005987038,0.0001704037,0.002210646],"genre_scores_gemma":[0.9974967,0.000009749712,0.002049511,0.0002746938,0.00003965314,0.00001377125,0.00004214888,0.00003835154,0.00003540283],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03478153,"threshold_uncertainty_score":0.9741935,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01096429863544196,"score_gpt":0.2370495547496339,"score_spread":0.226085256114192,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}