{"id":"W2964478081","doi":"10.1109/tmtt.2019.2925798","title":"Monolithically Integrated RF MEMS-Based Variable Attenuator for Millimeter-Wave Applications","year":2019,"lang":"en","type":"article","venue":"IEEE Transactions on Microwave Theory and Techniques","topic":"Microwave Engineering and Waveguides","field":"Engineering","cited_by":34,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Attenuator (electronics); Microelectromechanical systems; Return loss; Insertion loss; Materials science; Silicon on insulator; Radio frequency; Optoelectronics; Capacitive sensing; Electrical engineering; Surface micromachining; Coplanar waveguide; Extremely high frequency; Attenuation; Electronic engineering; Fabrication; Engineering; Optics; Silicon; Microwave; Telecommunications; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009410829,0.0002583372,0.00018719,0.0001584405,0.0001117828,0.0002795372,0.0004940882,0.0002562526,0.0004348895],"category_scores_gemma":[0.00009059076,0.0001630122,0.0001914779,0.0001131418,0.0001312048,0.0002965927,0.000227261,0.0002503385,0.0003349622],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001404824,"about_ca_system_score_gemma":0.00008581019,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000124678,"about_ca_topic_score_gemma":0.0003710717,"domain_scores_codex":[0.9999141,0.000007125506,0.000004705237,0.00002649836,0.00003461811,0.00001312981],"domain_scores_gemma":[0.9999307,0.00001378742,0.00002551264,0.000008445048,0.000016067,0.0000053712],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001953957,0.000006124317,0.0001973683,0.00002695558,0.000006697072,0.00002933973,0.00001112692,0.0001566003,0.9949044,0.0001960566,0.00006945292,0.004376299],"study_design_scores_gemma":[0.000008945082,0.0002558902,0.001569317,0.000004379963,0.00003960861,0.0002837981,0.00001572289,0.006516136,0.9858543,0.00005297586,0.005388812,0.00001016178],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8666554,0.004481584,0.1217384,0.000188558,0.0002180758,0.00004259223,0.0001607757,0.00118912,0.005325461],"genre_scores_gemma":[0.9381256,0.0007082527,0.05749792,0.0001048276,0.00008605677,0.00002631854,0.0001389149,0.00004505272,0.003266951],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0004940882,"threshold_uncertainty_score":0.00145483,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008438657736966244,"score_gpt":0.2126437727291099,"score_spread":0.2042051149921436,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}