{"id":"W2964892769","doi":"10.11159/icnfa19.136","title":"Atomic Layer Deposition of High-k Films on Graphene Surface","year":2019,"lang":"en","type":"article","venue":"Proceedings of the World Congress on New Technologies","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Atomic layer deposition; Graphene; Deposition (geology); Layer (electronics); Materials science; Nanotechnology; Optoelectronics; Chemical engineering; Geology; Engineering","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006377231,0.0004938528,0.0002531728,0.0004516039,0.0003148879,0.0002607964,0.0006189331,0.0004704906,0.001494454],"category_scores_gemma":[0.0001378147,0.0003300794,0.0003206102,0.0004343429,0.0001748067,0.0004004824,0.0003428107,0.0004752116,0.0005581335],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004658279,"about_ca_system_score_gemma":0.0001533774,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001025866,"about_ca_topic_score_gemma":0.002346322,"domain_scores_codex":[0.999887,0.000004699513,0.000006974356,0.00002940702,0.00004291798,0.00002890051],"domain_scores_gemma":[0.9999367,0.000006575613,0.00001456731,0.0000168775,0.00001634348,0.00000894065],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002054159,0.000008183788,0.0001232844,0.00009528794,0.000009103359,0.00009251916,0.00001375362,0.0001645209,0.9976156,0.000191296,0.0002123409,0.00145354],"study_design_scores_gemma":[0.000009759116,0.00006092473,0.001655691,0.00001166397,0.00001573676,0.0001438478,0.00001544911,0.002265949,0.9932936,0.00008658175,0.002425815,0.00001503011],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9649629,0.003415563,0.01552885,0.0004327204,0.0003573687,0.0001385835,0.002388373,0.0009565028,0.01181907],"genre_scores_gemma":[0.9722875,0.001461468,0.0230647,0.0001106054,0.00002706554,0.00005330755,0.0006200469,0.0000591625,0.002316009],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001494454,"threshold_uncertainty_score":0.004999518,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009987818411316289,"score_gpt":0.2101576244263169,"score_spread":0.2001698060150006,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}