{"id":"W2964892769","doi":"10.11159/icnfa19.136","title":"Atomic Layer Deposition of High-k Films on Graphene Surface","year":2019,"lang":"en","type":"article","venue":"Proceedings of the World Congress on New Technologies","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"Atomic layer deposition; Graphene; Deposition (geology); Layer (electronics); Materials science; Nanotechnology; Optoelectronics; Chemical engineering; Geology; Engineering","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006190329,0.0001718175,0.0002843672,0.0001629113,0.00002324499,0.00002998932,0.0005365352,0.0001061431,0.00003118865],"category_scores_gemma":[0.00002713931,0.000121015,0.00006773967,0.0003410593,0.000072549,0.0001252605,0.00009927145,0.0001472605,0.00001518028],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000212916,"about_ca_system_score_gemma":0.000005807345,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003362784,"about_ca_topic_score_gemma":0.00000721201,"domain_scores_codex":[0.9992367,0.000001824698,0.0002344527,0.0001748753,0.0001802814,0.0001718897],"domain_scores_gemma":[0.9995225,0.0000439748,0.0001597626,0.0002112985,0.00004796702,0.00001451427],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004774693,0.00001708166,0.003857463,0.0001735119,0.0000446942,1.167559e-7,0.00001901978,0.0005244599,0.9762028,0.01413529,0.004352595,0.0006252391],"study_design_scores_gemma":[0.0002702379,0.00006674485,0.001193531,0.0003879112,0.00001656168,0.000001115294,0.0001633996,0.0001967415,0.9932563,0.004016099,0.000299095,0.000132306],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9956267,0.0002513382,3.626939e-7,0.0002914958,0.0008646234,0.0002314632,0.000009070938,0.000675193,0.002049706],"genre_scores_gemma":[0.9988523,0.00008462605,0.0005357215,0.00002087469,0.00001156258,0.000006237564,7.086834e-7,0.00002509931,0.0004628473],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01705347,"threshold_uncertainty_score":0.4934848,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009987818411316289,"score_gpt":0.2101576244263169,"score_spread":0.2001698060150006,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}