{"id":"W2971939530","doi":"10.1109/mwsym.2019.8701106","title":"Monolithically Integrated Reconfigurable RF MEMS Based Impedance Tuner on SOI Substrate","year":2019,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":25,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Tuner; Silicon on insulator; Microelectromechanical systems; Materials science; Surface micromachining; Capacitive sensing; Capacitance; Insertion loss; Optoelectronics; Coplanar waveguide; Stiction; Fabrication; Impedance matching; Electrical engineering; Return loss; Electrical impedance; Radio frequency; Silicon; Engineering; Microwave; Antenna (radio); Telecommunications; Electrode; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009001623,0.0003415218,0.00029224,0.0002078898,0.0001408445,0.0004065026,0.0007785184,0.00038803,0.0008250512],"category_scores_gemma":[0.0001145992,0.0002061917,0.0002572373,0.0001763109,0.0001378931,0.0003542041,0.0002314718,0.000228373,0.0005474793],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000237711,"about_ca_system_score_gemma":0.0001152628,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002113527,"about_ca_topic_score_gemma":0.0005111149,"domain_scores_codex":[0.9997844,0.00001630995,0.00001054623,0.00006724177,0.00009007077,0.00003142407],"domain_scores_gemma":[0.9998907,0.00001603272,0.00004215551,0.00002134822,0.00001912945,0.00001070293],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000445162,0.00001308829,0.0002326699,0.00003742118,0.000009136766,0.0001051527,0.00001776525,0.0005258544,0.9923077,0.0003004389,0.0001773486,0.006229023],"study_design_scores_gemma":[0.00005050761,0.0006453711,0.005202802,0.000008699872,0.0000427104,0.0008030084,0.0000372434,0.02312354,0.9596882,0.0001563969,0.01020537,0.00003616156],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8862975,0.001519801,0.09766857,0.000203926,0.0001831901,0.00009914914,0.0004084932,0.001992275,0.01162702],"genre_scores_gemma":[0.9557275,0.0002546031,0.04006857,0.00007114293,0.00003953595,0.00003523739,0.0001915859,0.000063903,0.003548011],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008250512,"threshold_uncertainty_score":0.002760053,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009328200083900094,"score_gpt":0.2084475544849245,"score_spread":0.1991193544010244,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}