{"id":"W2988153346","doi":"","title":"Post-porosity Plasma protection (P4): a promising strategy against v-UV damage in porous, low-k materials","year":2015,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Porosity; Materials science; Plasma; Porous medium; Composite material; Chemical engineering; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow","scholarly_communication"],"consensus_categories":[],"category_scores_codex":[0.01071499,0.0005305071,0.0007201157,0.0002517681,0.0003187976,0.001116142,0.001379996,0.0005758167,0.0005109966],"category_scores_gemma":[0.002331071,0.0005113225,0.0001498177,0.000285701,0.0003448694,0.0003599094,0.001884519,0.0008148248,0.0001179325],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000561911,"about_ca_system_score_gemma":0.0008632965,"about_ca_topic_candidate":true,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.01196133,"about_ca_topic_score_gemma":0.01062564,"domain_scores_codex":[0.9898406,0.006523334,0.001081465,0.001360473,0.0005890264,0.0006051493],"domain_scores_gemma":[0.9935179,0.0003651579,0.0008074705,0.002308917,0.002750142,0.0002504467],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001085381,0.0008675457,0.0003089377,0.0005735305,0.00001937534,0.00002039497,0.00636655,0.0004083229,0.9837209,0.001244341,0.0002258926,0.006135691],"study_design_scores_gemma":[0.0009130074,0.000002894992,0.005041522,0.003168195,0.00002794991,0.00001655191,0.0002951798,0.004299071,0.9825438,0.002545729,0.000417402,0.0007287346],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9840487,0.0001546613,0.001465757,0.002625764,0.0007887607,0.001678579,0.0003663136,0.0003219119,0.008549513],"genre_scores_gemma":[0.9930133,0.00007074529,0.004189837,0.00006154893,0.00005403133,0.0001875715,0.0004853798,0.00006333212,0.001874239],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.008964575,"threshold_uncertainty_score":0.9999208,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02014420524750155,"score_gpt":0.2395407106935013,"score_spread":0.2193965054459998,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}