{"id":"W2994790184","doi":"10.3390/s19245434","title":"Dual-Level Capacitive Micromachined Uncooled Thermal Detector","year":2019,"lang":"en","type":"article","venue":"Sensors","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"École de Technologie Supérieure; McGill University","funders":"CMC Microsystems","keywords":"Capacitance; Capacitive sensing; Bimorph; Detector; Sensitivity (control systems); Parasitic capacitance; Electrical engineering; Surface micromachining; Electronic circuit; Electrode; Materials science; Optoelectronics; Electronic engineering; Engineering; Fabrication; Voltage; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":["insufficient_payload"],"category_scores_codex":[0.00007229608,0.0001533717,0.0001930753,0.00002559258,0.00004978069,0.00002262308,0.00009397804,0.00004804594,0.003963311],"category_scores_gemma":[0.0000152006,0.0001163342,0.0001300273,0.0000943129,0.00003146764,0.00003454251,0.00004548346,0.0001940145,0.001848987],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001440253,"about_ca_system_score_gemma":0.00002355842,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001328697,"about_ca_topic_score_gemma":0.000002820319,"domain_scores_codex":[0.9991002,0.00004897051,0.0001560224,0.0002419205,0.0001537546,0.0002991412],"domain_scores_gemma":[0.9994501,0.0001292612,0.00004472905,0.000193169,0.00004020428,0.0001424984],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003921983,0.0004892768,0.03432037,0.0000484502,0.0005453146,0.00003228123,0.00104884,0.0004190861,0.6193548,0.2750248,0.0006490931,0.06767554],"study_design_scores_gemma":[0.007397203,0.0007813314,0.09527357,0.0001545869,0.0001936525,0.00000703714,0.001915437,0.02219395,0.8105204,0.02984753,0.02917017,0.00254517],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9688848,0.000007037993,0.0001789106,0.00009817418,0.0001947213,0.0001701755,0.00007289339,0.00003236187,0.03036094],"genre_scores_gemma":[0.9923955,2.045349e-7,0.0004948569,0.00008870535,0.0001891619,0.000005432139,0.00001209512,0.00001959473,0.006794496],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2451773,"threshold_uncertainty_score":0.9989282,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01034759824526569,"score_gpt":0.2206266449672754,"score_spread":0.2102790467220097,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}