{"id":"W2994909173","doi":"10.1007/s10854-019-02758-z","title":"Low leakage GaN HEMTs with sub-100 nm T-shape gates fabricated by a low-damage etching process","year":2019,"lang":"en","type":"article","venue":"Journal of Materials Science Materials in Electronics","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":8,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of British Columbia","funders":"Guangdong Science and Technology Department","keywords":"Materials science; Optoelectronics; Resist; Threshold voltage; Etching (microfabrication); Short-channel effect; Gallium nitride; Leakage (economics); Transistor; Metal gate; Fabrication; Dry etching; Plasma etching; Voltage; Gate oxide; Electrical engineering; MOSFET; Nanotechnology; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001407322,0.0004250799,0.0005673087,0.0002370637,0.0002807434,0.0006287169,0.0007836717,0.0006040168,0.0008414444],"category_scores_gemma":[0.0002781516,0.0003715843,0.0002550901,0.0002916549,0.0002915846,0.0004486151,0.0002870757,0.0005175309,0.0004905959],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005091357,"about_ca_system_score_gemma":0.0003787644,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009542269,"about_ca_topic_score_gemma":0.002372204,"domain_scores_codex":[0.9998555,0.00000858457,0.000008737888,0.00003888296,0.00005559972,0.0000327388],"domain_scores_gemma":[0.9997725,0.00003147201,0.00006630311,0.00004740902,0.00005088001,0.00003150967],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007178573,0.00002693226,0.0003970202,0.00005973491,0.00001825842,0.0001031559,0.00004926051,0.0001900378,0.9974176,0.0003183097,0.0002160417,0.001131826],"study_design_scores_gemma":[0.00006491307,0.0004021515,0.007247438,0.00001545597,0.00004629365,0.0004706154,0.0000442043,0.00403922,0.9852941,0.0001755822,0.002176486,0.00002344464],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9883428,0.0005097401,0.006667338,0.000113433,0.0001118385,0.00007386661,0.0005303608,0.0003571027,0.003293498],"genre_scores_gemma":[0.9866071,0.0002029371,0.01012158,0.00005028764,0.00002210447,0.00004110797,0.0002180977,0.00007757825,0.002659274],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009542269,"threshold_uncertainty_score":0.003694117,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005047478100973811,"score_gpt":0.237242365590326,"score_spread":0.2321948874893522,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}