{"id":"W2999266736","doi":"","title":"Challenges of contact etching for 14FDSOI technology","year":2015,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Etching (microfabrication); Materials science; Computer science; Optoelectronics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001985971,0.0003646554,0.0007858839,0.0003475167,0.001128421,0.003173236,0.001002713,0.001827194,0.0108114],"category_scores_gemma":[0.001607678,0.0002920462,0.0003869864,0.0003747808,0.0006971363,0.002444887,0.001375226,0.001310588,0.003347758],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00173363,"about_ca_system_score_gemma":0.001429816,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001089176,"about_ca_topic_score_gemma":0.00280274,"domain_scores_codex":[0.9988789,0.00007323469,0.00003172878,0.0001104623,0.0007057475,0.0001999125],"domain_scores_gemma":[0.9991167,0.0002687174,0.00008358144,0.0001163427,0.0003336495,0.00008094873],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0004057024,0.0002948897,0.003804309,0.002456087,0.00009880649,0.0007517787,0.002122321,0.008195722,0.5239718,0.1601933,0.03577968,0.2619256],"study_design_scores_gemma":[0.00006368228,0.0009040742,0.004498174,0.0003415533,0.00005529747,0.001612444,0.002775169,0.02506126,0.3578516,0.04109,0.5656312,0.0001156942],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.4627071,0.06797379,0.0889026,0.03580143,0.004807041,0.0004529338,0.0009724651,0.001521319,0.3368613],"genre_scores_gemma":[0.7998275,0.02404707,0.06916436,0.002124962,0.0009271274,0.0002448155,0.0007603792,0.0005916172,0.1023122],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0108114,"threshold_uncertainty_score":0.0361678,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03042916538793293,"score_gpt":0.2471672859749909,"score_spread":0.216738120587058,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}