{"id":"W2999547713","doi":"10.1116/1.5123601","title":"Effects of mask material conductivity on lateral undercut etching in silicon nano-pillar fabrication","year":2020,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Nanowire Synthesis and Applications","field":"Engineering","cited_by":23,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Undercut; Etching (microfabrication); Silicon; Materials science; Fabrication; Resist; Reactive-ion etching; Electron-beam lithography; Lithography; Isotropic etching; Dry etching; Nanotechnology; Oxide; Silicon oxide; Chromium; Optoelectronics; Metallurgy; Composite material; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002546158,0.0003378823,0.0002392857,0.0001531284,0.000188717,0.0005673265,0.000255576,0.0003639381,0.001022624],"category_scores_gemma":[0.001230167,0.0003134951,0.0001847812,0.000153347,0.0002377749,0.0004142543,0.0003490041,0.0002190447,0.0002886301],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000269994,"about_ca_system_score_gemma":0.0001798086,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002563318,"about_ca_topic_score_gemma":0.0005138696,"domain_scores_codex":[0.9996974,0.00004286972,0.00003145987,0.00006908566,0.0001017607,0.00005741999],"domain_scores_gemma":[0.9986776,0.0006800215,0.0003369294,0.0001130677,0.0001227993,0.00006972011],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001142672,0.00001788578,0.0004351785,0.00005714806,0.000008378079,0.0001057999,0.0000502195,0.0003059844,0.9963236,0.0001079737,0.00004426123,0.002429331],"study_design_scores_gemma":[0.000006943236,0.0001273988,0.001711485,0.000007353982,0.00001614449,0.0001049129,0.00002644326,0.002129562,0.9953741,0.00003496485,0.0004545032,0.0000061152],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9931921,0.001197305,0.003617712,0.0000825086,0.00005826476,0.00001813307,0.00007204576,0.0001144356,0.001647497],"genre_scores_gemma":[0.9955598,0.0004744124,0.003229675,0.0000537351,0.0000135233,0.00001221188,0.00004225563,0.0000558322,0.0005584503],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001022624,"threshold_uncertainty_score":0.003421068,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01064892995887232,"score_gpt":0.2090336048338395,"score_spread":0.1983846748749672,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}