{"id":"W2999864622","doi":"","title":"Interaction of humidity with plasma-damaged porous low-k","year":2018,"lang":"en","type":"preprint","venue":"HAL (Le Centre pour la Communication Scientifique Directe)","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"","keywords":"Humidity; Plasma; Materials science; Porosity; Composite material; Physics; Thermodynamics; Nuclear physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001091716,0.0001391146,0.0002357122,0.0001232236,0.0003719779,0.000475405,0.0003012714,0.0004053023,0.002426015],"category_scores_gemma":[0.0004305109,0.0001376683,0.000127647,0.0001506198,0.0005289267,0.0004051086,0.0003190335,0.0002750991,0.0002553502],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003578376,"about_ca_system_score_gemma":0.0001243613,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001911354,"about_ca_topic_score_gemma":0.001231773,"domain_scores_codex":[0.9997811,0.00001761365,0.00000620747,0.00005176654,0.00006484408,0.00007846801],"domain_scores_gemma":[0.9998156,0.00007291418,0.00004142347,0.00002288787,0.00002736896,0.00001965208],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0007136569,0.00002784526,0.00110441,0.0001061523,0.00001671607,0.0003516637,0.000241473,0.0008541704,0.9940894,0.0002696268,0.0001789572,0.002046094],"study_design_scores_gemma":[0.00001376564,0.0001497089,0.003096953,0.000003771083,0.000008643603,0.0001614922,0.0001770844,0.001853061,0.9934929,0.00005439407,0.0009800447,0.000008173942],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9978377,0.00020265,0.0005856424,0.00004272289,0.00002069956,0.000006634475,0.0000682296,0.00003767324,0.001198077],"genre_scores_gemma":[0.9992692,0.00004805265,0.000114589,0.000009380851,0.00000331246,0.000001413481,0.00002967058,0.000006755743,0.0005176102],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002426015,"threshold_uncertainty_score":0.008115888,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01522507228504982,"score_gpt":0.2410400876668896,"score_spread":0.2258150153818398,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}