{"id":"W3001804163","doi":"10.1088/1361-6439/ab6dbd","title":"On the fabrication of thin-film artificial metal grid resonator antenna arrays using deep x-ray Lithography","year":2020,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Antenna Design and Analysis","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"Canadian Light Source (Canada); University of Saskatchewan","funders":"Canadian Light Source","keywords":"Fabrication; Lithography; Materials science; Resonator; X-ray lithography; Antenna (radio); Photolithography; Grid; Optoelectronics; Nanotechnology; Engineering; Electrical engineering; Resist; Geology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002984046,0.0001855021,0.0003571802,0.0002232471,0.00005851171,0.00004077108,0.0001944505,0.00006421343,0.00001567432],"category_scores_gemma":[0.00006023923,0.000140242,0.0002404546,0.0004343875,0.00002009488,0.0001058279,0.00002529229,0.0003219402,0.000001412981],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002348396,"about_ca_system_score_gemma":0.00001270296,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001700737,"about_ca_topic_score_gemma":2.956957e-7,"domain_scores_codex":[0.9989849,0.00002489581,0.0005065843,0.0001170381,0.0001714224,0.0001951911],"domain_scores_gemma":[0.9994031,0.00006334156,0.0001822949,0.0001133791,0.0001285188,0.0001093845],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00001920154,0.0000155667,0.000005768465,0.00005686979,0.0001963566,0.00001005742,0.0004049792,0.01457349,0.9836619,0.0006258957,0.00005891634,0.0003709544],"study_design_scores_gemma":[0.0001726919,0.0001088525,0.00002338983,0.0001192415,0.000160193,0.00003416242,0.0004590197,0.9162849,0.08192087,0.0001962471,0.0003542842,0.000166126],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.44671,0.00303608,0.5497642,0.0001623564,0.0002262464,0.00006150179,0.00001182844,0.00002376377,0.000004052391],"genre_scores_gemma":[0.9944091,0.0007326187,0.004518862,0.00009035228,0.0002097733,7.021316e-7,0.000001424275,0.00003555168,0.000001590306],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.9017411,"threshold_uncertainty_score":0.5718902,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01581838244098243,"score_gpt":0.1928359266228119,"score_spread":0.1770175441818294,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}