{"id":"W3003431293","doi":"10.1088/1361-6439/ab71e6","title":"Design and characterization of compact digital RF MEMS capacitors and phase shifters in CMOS 0.35 <i>µ</i> m technology","year":2020,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"CMOS; Microelectromechanical systems; Capacitor; Characterization (materials science); Electrical engineering; Electronic engineering; Engineering; Materials science; Optoelectronics; Voltage; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003172707,0.0003510647,0.0003566164,0.0003252172,0.0002081082,0.0006359708,0.000666466,0.0005632127,0.0009182146],"category_scores_gemma":[0.0006146659,0.0002248286,0.0001658768,0.0003226204,0.0003067694,0.0005059922,0.0001663162,0.0002091416,0.0002901141],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0007528401,"about_ca_system_score_gemma":0.0005425572,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001015677,"about_ca_topic_score_gemma":0.001617862,"domain_scores_codex":[0.9996843,0.00001922289,0.00001353123,0.00007493145,0.0001640343,0.00004396037],"domain_scores_gemma":[0.9994666,0.00009938187,0.0002038723,0.00005094873,0.0001456054,0.0000336729],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005536004,0.00001934917,0.0004832111,0.0001336885,0.00001392842,0.0001263395,0.00008583429,0.0009826906,0.9933035,0.0003489029,0.0002145283,0.004232607],"study_design_scores_gemma":[0.00003487225,0.0008164291,0.004980043,0.00001481772,0.0000373433,0.0003492885,0.00008645084,0.00496605,0.9818463,0.00008488649,0.006755499,0.00002802903],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.9812416,0.001603944,0.01383447,0.0001797724,0.00007844019,0.0001135338,0.000456926,0.000263422,0.002227729],"genre_scores_gemma":[0.9662162,0.0004899607,0.02957842,0.0000807082,0.00002180149,0.00007714873,0.000252324,0.00003480498,0.003248704],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.001015677,"threshold_uncertainty_score":0.005462229,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009008463967351995,"score_gpt":0.1945723822707412,"score_spread":0.1855639183033892,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}