{"id":"W3008645591","doi":"10.1088/1361-6641/ab7844","title":"Surface recombination velocity on wet-cleaned silicon wafers using heterodyne lock-in ca rrierography imaging: measurement uniqueness investigation","year":2020,"lang":"en","type":"article","venue":"Semiconductor Science and Technology","topic":"Thermography and Photoacoustic Techniques","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"National Natural Science Foundation of China; Canada Research Chairs","keywords":"Wafer; Heterodyne (poetry); Silicon; Materials science; Optics; Surface (topology); Optoelectronics; Semiconductor; Physics; Acoustics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002981193,0.0002832877,0.0002354643,0.0003160899,0.0001921375,0.0002964171,0.0002419284,0.0003088721,0.0008007071],"category_scores_gemma":[0.0004025103,0.0001741229,0.0001456517,0.0002524911,0.0002959388,0.0002836112,0.0001927614,0.0002473807,0.0001286631],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003079347,"about_ca_system_score_gemma":0.0001979863,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001648837,"about_ca_topic_score_gemma":0.001678411,"domain_scores_codex":[0.999843,0.00001617262,0.000007722248,0.00003554749,0.00006083468,0.00003672969],"domain_scores_gemma":[0.9996682,0.0001104165,0.00008067781,0.00003356519,0.00008753602,0.00001950181],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001971426,0.000005815947,0.0002363164,0.00001388356,0.000001689919,0.00001944917,0.00003590855,0.00005145943,0.9988029,0.00002550545,0.00001126503,0.0007761114],"study_design_scores_gemma":[0.0000025613,0.00008377441,0.002925392,0.000001655814,0.000005170792,0.00004068578,0.00004960375,0.001487256,0.9951857,0.00000728887,0.0002056856,0.000005139715],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9942162,0.0004229601,0.004713815,0.00002612291,0.0000096143,0.00002197994,0.00007528097,0.00005355874,0.0004604799],"genre_scores_gemma":[0.9927851,0.0003391869,0.006044666,0.00001442263,0.000005380135,0.00001889047,0.00007544855,0.00001540797,0.0007015705],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001648837,"threshold_uncertainty_score":0.003278494,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03048741631435602,"score_gpt":0.2302048532320362,"score_spread":0.1997174369176802,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}