{"id":"W3011397136","doi":"10.1116/1.5140364","title":"Impacts on access resistance of InP high electron mobility transistors from wafer processing","year":2020,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada; Herzberg Institute of Astrophysics","funders":"","keywords":"Wafer; Ohmic contact; Materials science; Optoelectronics; Contact resistance; Transistor; Fabrication; Electronic engineering; Nanotechnology; Electrical engineering; Layer (electronics); Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002533179,0.000457768,0.0004417767,0.0002486515,0.0003207261,0.0006452515,0.0004036934,0.0005844429,0.001368943],"category_scores_gemma":[0.001431413,0.0002217749,0.0003085998,0.0002656281,0.000258544,0.0008286108,0.0002605695,0.0005851589,0.0002927428],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002814673,"about_ca_system_score_gemma":0.0001096992,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004467715,"about_ca_topic_score_gemma":0.0007113398,"domain_scores_codex":[0.9996939,0.00003228988,0.00001540756,0.00006308146,0.0001491007,0.00004631677],"domain_scores_gemma":[0.9993352,0.0002663763,0.00013135,0.00007592505,0.0001692044,0.00002184151],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001554606,0.0000228857,0.001176623,0.0001188133,0.00002510527,0.0004348884,0.0001487417,0.0006702106,0.9905285,0.00008753895,0.0001195592,0.006511457],"study_design_scores_gemma":[0.000004421309,0.0004895336,0.01037036,0.00001093146,0.00006238082,0.000619134,0.0001003769,0.002637463,0.9839137,0.00009576645,0.001680838,0.00001505227],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9901999,0.001753952,0.005352045,0.0001578016,0.00007694653,0.00003332639,0.0002597563,0.0001450178,0.00202126],"genre_scores_gemma":[0.9963135,0.0006298359,0.001680494,0.00004805888,0.00001682556,0.00001736373,0.0001622363,0.00005046384,0.001081106],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001368943,"threshold_uncertainty_score":0.004579544,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01828115083628064,"score_gpt":0.2327007422098334,"score_spread":0.2144195913735527,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}