{"id":"W3015108016","doi":"10.3390/act9020024","title":"A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices","year":2020,"lang":"en","type":"article","venue":"Actuators","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"York University","funders":"","keywords":"Microelectromechanical systems; Cantilever; Microscale chemistry; Drag; Actuator; Airflow; Capacitive sensing; Deflection (physics); Acoustics; Mechanical engineering; Aerodynamic force; Aerodynamics; Electronic engineering; Engineering; Materials science; Electrical engineering; Structural engineering; Nanotechnology; Aerospace engineering; Optics; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006751424,0.0001956039,0.0002559176,0.00002332733,0.0001223796,0.00005659833,0.000147877,0.00004967252,0.0001655033],"category_scores_gemma":[0.0002553533,0.0001627042,0.0000951867,0.0001581105,0.00002194007,0.0001245855,0.00005932582,0.0001290286,0.00003221694],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00000970552,"about_ca_system_score_gemma":0.0001648186,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000557837,"about_ca_topic_score_gemma":0.000001663478,"domain_scores_codex":[0.9989929,0.000009901863,0.000214134,0.0003367978,0.0001338858,0.0003123996],"domain_scores_gemma":[0.9984899,0.0007359396,0.0001012681,0.0001072008,0.00004899165,0.0005167006],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002660623,0.0001568618,0.05808819,0.0003692937,0.0003162458,0.000009074854,0.001311528,0.000009327026,0.08558143,0.02480883,0.002984715,0.8260984],"study_design_scores_gemma":[0.009049108,0.002365263,0.02358653,0.0006721846,0.0006246719,0.0000018408,0.001880863,0.04364245,0.7707301,0.02044978,0.1238767,0.003120552],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.893755,0.00001778903,0.1022356,0.002731646,0.00009248812,0.000437626,0.00004195689,0.0000679029,0.0006200289],"genre_scores_gemma":[0.9814622,4.448522e-7,0.01576303,0.002142375,0.0005262046,0.00003381395,0.0000180322,0.00002735481,0.0000265863],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.8229779,"threshold_uncertainty_score":0.6634886,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02861386956565057,"score_gpt":0.2477898125200333,"score_spread":0.2191759429543827,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}