{"id":"W3017697327","doi":"10.1088/1361-6528/ab8d69","title":"High-energy ion (He + , Si ++ , Ga + , Au ++ ) interactions with PMMA in ion beam lithography","year":2020,"lang":"en","type":"article","venue":"Nanotechnology","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Resist; Ion; Materials science; Atomic physics; Recoil; Atom (system on chip); Ion beam lithography; Ion beam; Vacancy defect; Nanotechnology; Physics; Chemistry; Crystallography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow","research_integrity","insufficient_payload"],"consensus_categories":["metaepi_narrow","research_integrity"],"category_scores_codex":[0.0004614495,0.001690431,0.00201868,0.003302768,0.0007198646,0.0003202944,0.001575296,0.001827838,0.001124915],"category_scores_gemma":[0.0003605197,0.001673211,0.0009108706,0.00626594,0.0005742466,0.001352801,0.000512208,0.003413224,0.0006740744],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001020769,"about_ca_system_score_gemma":0.0002509248,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002804059,"about_ca_topic_score_gemma":0.0006865194,"domain_scores_codex":[0.9922221,0.0003284311,0.002070309,0.002157877,0.000949337,0.002271978],"domain_scores_gemma":[0.9959915,0.0005408992,0.0004399941,0.001975212,0.0004600681,0.000592345],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0002860725,0.0004960513,0.002198784,0.0001836589,0.001093296,0.0002572405,0.002640643,0.9655529,0.004869779,0.002377638,0.005940428,0.01410353],"study_design_scores_gemma":[0.002774085,0.0009728812,0.0001435657,0.0005402774,0.0006140197,0.0003170619,0.006933547,0.7933082,0.01958054,0.0007104723,0.1720286,0.002076726],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9594272,0.0008767798,0.02499506,0.00877024,0.0004641317,0.0008172748,0.0002473183,0.003242866,0.001159097],"genre_scores_gemma":[0.9909222,0.001028102,0.004394262,0.0007295334,0.0007963556,0.0004789346,0.0004138995,0.0004144481,0.0008222343],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1722447,"threshold_uncertainty_score":0.9997882,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007356221514372824,"score_gpt":0.2052324644085755,"score_spread":0.1978762428942026,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}