{"id":"W3023183568","doi":"10.1006/rwvb.2001.0073","title":"MEMS, GENERAL PROPERTIES","year":2001,"lang":"en","type":"book-chapter","venue":"Elsevier eBooks","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":false,"ca_institutions":"Concordia University","funders":"","keywords":"Materials science; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00003835443,0.0004410006,0.0004309549,0.0001308861,0.00005964961,0.00002631671,0.0002624894,0.0004413441,0.0001209684],"category_scores_gemma":[0.00000607225,0.0003796669,0.0001197638,0.00001045732,0.0001236339,0.00004411227,0.00008843974,0.0005388181,0.000207005],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009261328,"about_ca_system_score_gemma":0.00002095835,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":2.632987e-7,"about_ca_topic_score_gemma":0.00001468352,"domain_scores_codex":[0.9989476,9.475567e-7,0.0002878543,0.0002690563,0.0001691012,0.0003254117],"domain_scores_gemma":[0.9993498,0.000006994679,0.00005107049,0.0004950388,0.00003738249,0.00005973534],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.000002222278,0.00000117353,1.182065e-7,0.00007909614,0.00006455117,0.00003955166,0.00002584348,0.00005375033,0.004981967,0.002618221,0.0006768213,0.9914567],"study_design_scores_gemma":[0.00009200121,0.00002220227,6.920297e-7,0.0002328148,0.00003108659,0.00002418654,0.000004010107,0.00001759966,0.007862603,0.009655737,0.9815753,0.0004818189],"study_design_candidate":"design_other","study_design_consensus":null,"genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.0004088608,0.007985126,0.00001172557,0.00001568671,0.0004762266,0.000288924,0.00001254526,0.00149728,0.9893036],"genre_scores_gemma":[0.0004665515,0.002723781,0.0006574924,0.00005257299,0.000392391,0.00005257343,0.000008921539,0.0001800431,0.9954657],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.9909748,"threshold_uncertainty_score":0.9998655,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0194795955345323,"score_gpt":0.2088879678511826,"score_spread":0.1894083723166503,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}