{"id":"W3023183568","doi":"10.1006/rwvb.2001.0073","title":"MEMS, GENERAL PROPERTIES","year":2001,"lang":"en","type":"book-chapter","venue":"Elsevier eBooks","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":false,"ca_institutions":"Concordia University","funders":"","keywords":"Materials science; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002492751,0.001956841,0.001708103,0.002092319,0.0007928987,0.001770441,0.001124188,0.001526091,0.07310296],"category_scores_gemma":[0.0005819685,0.0007534591,0.0004189564,0.002768168,0.0007072988,0.003170343,0.001270167,0.002153289,0.06642561],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0009500287,"about_ca_system_score_gemma":0.0005629715,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001197659,"about_ca_topic_score_gemma":0.002300081,"domain_scores_codex":[0.9997324,0.00001807786,0.0000124698,0.00007143414,0.0001422872,0.00002326666],"domain_scores_gemma":[0.9998853,0.00002816953,0.000008391503,0.00003596858,0.00003397833,0.000008216735],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.00003916647,0.00006119446,0.0001492929,0.001269524,0.00002000866,0.0001957481,0.0002333942,0.0009807234,0.01255981,0.1493729,0.2772163,0.5579019],"study_design_scores_gemma":[0.000006376514,0.00001983585,0.0002330263,0.0001201949,0.000009824705,0.0003054675,0.00002737306,0.0004616923,0.001408117,0.02382452,0.9735751,0.000008461885],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"other","genre_gemma":"other","genre_scores_codex":[0.002405131,0.1118382,0.02725532,0.002050712,0.00318606,0.000107657,0.001121698,0.001580476,0.8504548],"genre_scores_gemma":[0.01028227,0.038418,0.01059662,0.0007229081,0.001103978,0.0002125432,0.001185749,0.0005303715,0.9369476],"genre_candidate":"other","genre_consensus":"other","teacher_disagreement_score":0.07310296,"threshold_uncertainty_score":0.2445537,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0194795955345323,"score_gpt":0.2088879678511826,"score_spread":0.1894083723166503,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}