{"id":"W3023415171","doi":"10.1149/ma2020-01161089mtgabs","title":"Influence of Different Carbon Precursors on Optical and Electrical Properties of Silicon Carbonitride Thin Films","year":2020,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of New Brunswick; McMaster University","funders":"","keywords":"Materials science; Elastic recoil detection; Thin film; Plasma-enhanced chemical vapor deposition; Silicon; Chemical vapor deposition; Analytical Chemistry (journal); Carbon film; Dielectric; Band gap; Ellipsometry; Silicon oxide; Silicon oxynitride; Rutherford backscattering spectrometry; Silicon nitride; Optoelectronics; Nanotechnology; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009586396,0.0001944144,0.000338002,0.00007784547,0.00001811744,0.00001031747,0.0001785505,0.0001567591,5.817658e-7],"category_scores_gemma":[0.0007981865,0.0001673301,0.00004183693,0.0001396837,0.0001194665,0.00004076879,0.00003096558,0.0004053476,8.989298e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000294527,"about_ca_system_score_gemma":0.0000155962,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00006439973,"about_ca_topic_score_gemma":0.000004379643,"domain_scores_codex":[0.9988906,0.00001892119,0.000404253,0.0002050257,0.0002432001,0.0002379439],"domain_scores_gemma":[0.9994951,0.0001379856,0.00007864946,0.0001699074,0.00003626098,0.00008206803],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003812018,0.00002467701,0.001278654,0.0002537069,0.00002208633,0.000004018078,0.000646274,0.303308,0.6943017,0.00001691727,0.000005434009,0.0001003557],"study_design_scores_gemma":[0.0001878816,0.0001917757,0.030412,0.000267577,0.0000251042,0.000001803895,0.00007464288,0.01891441,0.9497432,0.00002433427,0.00000537303,0.0001519833],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9957573,0.0006483512,2.762855e-7,0.0001051147,0.00003777998,0.0001662472,0.000003177404,0.0003852435,0.002896474],"genre_scores_gemma":[0.9996831,0.00004934894,0.0001997048,0.00001219789,0.00001589609,0.000008431036,5.54665e-7,0.0000286421,0.000002065276],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2843936,"threshold_uncertainty_score":0.6823524,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0126769181839571,"score_gpt":0.1917940737847848,"score_spread":0.1791171556008277,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}