{"id":"W3025607346","doi":"10.1149/ma2020-01522934mtgabs","title":"Characterization of Europium Doped Silicon Oxide, Silicon Oxynitride, and Silicon Nitride Films Prepared By Integrated Ecr-PECVD and Magnetron Sputtering","year":2020,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Silicon Nanostructures and Photoluminescence","field":"Materials Science","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of New Brunswick; McMaster University","funders":"","keywords":"Materials science; Plasma-enhanced chemical vapor deposition; Silicon oxynitride; Sputter deposition; Silicon; Sputtering; Passivation; Silicon nitride; Thin film; Doping; Silicon oxide; Analytical Chemistry (journal); Optoelectronics; Nanotechnology; Chemistry; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.000404674,0.0004064369,0.000554401,0.00009611626,0.0001579231,0.0002275935,0.000287399,0.0001836047,0.000117652],"category_scores_gemma":[0.0009074063,0.0003941781,0.00005591437,0.0003076752,0.0001896378,0.0003854992,0.0001772443,0.0002457423,0.00001592417],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002337103,"about_ca_system_score_gemma":0.00006145371,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007887166,"about_ca_topic_score_gemma":0.0000187482,"domain_scores_codex":[0.9973601,0.000144947,0.0008818593,0.0008018123,0.0003363272,0.0004749152],"domain_scores_gemma":[0.9983369,0.000231621,0.0006386519,0.0003076573,0.0001627563,0.0003224735],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002171249,0.00003119637,0.00545715,0.0002347885,0.000009550457,0.00001273885,0.0005249023,0.0001381819,0.9929008,0.000001446206,0.0002425083,0.0002295775],"study_design_scores_gemma":[0.0007255016,0.0001983368,0.04738937,0.0001788441,0.00003534375,0.00002399817,0.0001622064,0.001281979,0.9489467,0.000006160252,0.0006945026,0.0003570765],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9977485,0.0003033288,0.000002296169,0.0002567729,0.0002493548,0.0004988237,0.0002219262,0.000170741,0.0005482364],"genre_scores_gemma":[0.9989913,0.0001155012,0.0001916897,0.0003375022,0.0001053428,0.00001363309,0.0001249099,0.00005156711,0.00006854619],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04395415,"threshold_uncertainty_score":0.999851,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01058126264527439,"score_gpt":0.2119949745003014,"score_spread":0.201413711855027,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}