{"id":"W3035212970","doi":"10.1116/6.0000203","title":"Self-detached membranes with well-defined pore size, shape and distribution fabricated by underexposure photolithography","year":2020,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Microfluidic and Capillary Electrophoresis Applications","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Membrane; Photoresist; Photolithography; Wafer; Microporous material; Polymer; Layer (electronics); Filtration (mathematics); Composite material; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002808612,0.0003451773,0.0003001181,0.0002544915,0.0001776208,0.0003358654,0.0003953652,0.0006397531,0.0004631536],"category_scores_gemma":[0.0003326518,0.000382291,0.0002959577,0.0001876995,0.0002825492,0.0005964618,0.0003726165,0.0008126848,0.0003258003],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002680227,"about_ca_system_score_gemma":0.0002653416,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001608728,"about_ca_topic_score_gemma":0.0003208374,"domain_scores_codex":[0.9997219,0.00001884641,0.00002790415,0.00007053832,0.000113885,0.00004684029],"domain_scores_gemma":[0.9996116,0.00007026628,0.0001196944,0.00009413846,0.00006632526,0.00003799963],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004362493,0.000004133706,0.00002497837,0.00001312979,0.000001414732,0.00001395058,0.000008742048,0.00001920964,0.999033,0.00007757618,0.00001359018,0.0007859677],"study_design_scores_gemma":[0.000003315178,0.00003631116,0.0008272473,0.000001622721,0.00000437958,0.0001118208,0.000006363579,0.0003543601,0.9972112,0.00003509669,0.001403017,0.000005200349],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8799138,0.001652692,0.1143084,0.000193344,0.0001201287,0.0001636367,0.0004778823,0.0006105881,0.002559569],"genre_scores_gemma":[0.889084,0.001277137,0.1035401,0.0001592314,0.00003734103,0.0002135195,0.0005859766,0.0001303165,0.00497245],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006397531,"threshold_uncertainty_score":0.001944661,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005690107171858022,"score_gpt":0.1784257153867896,"score_spread":0.1727356082149316,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}