{"id":"W3037867998","doi":"10.1088/0256-307x/37/6/068503","title":"A Novel Oxygen-Based Digital Etching Technique for p-GaN/AlGaN Structures without Etch-Stop Layers*","year":2020,"lang":"en","type":"article","venue":"Chinese Physics Letters","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Materials science; Etching (microfabrication); Dry etching; Optoelectronics; Epitaxy; Inductively coupled plasma; Plasma; Layer (electronics); Plasma etching; Etch pit density; Reactive-ion etching; Surface roughness; Surface finish; Analytical Chemistry (journal); Nanotechnology; Composite material; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.00007226036,0.0004571675,0.0004859138,0.00004020161,0.0001674426,0.0002924127,0.0003806486,0.00005740889,0.00005419504],"category_scores_gemma":[0.00001671878,0.0003872336,0.0003127706,0.0002037995,0.00006613828,0.0003477325,0.00005597773,0.000231718,0.00001346473],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002551582,"about_ca_system_score_gemma":0.00007128066,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00008975823,"about_ca_topic_score_gemma":7.336676e-7,"domain_scores_codex":[0.9984691,0.00002089563,0.0003351832,0.0005389723,0.0002049309,0.0004308791],"domain_scores_gemma":[0.9990841,0.00009178277,0.000231411,0.0003367482,0.00006807084,0.000187845],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006323089,0.00006366488,0.00447357,0.000108772,0.0000911114,0.000001066586,0.0005802408,0.002181516,0.9901678,0.001053483,0.0006401533,0.0005753899],"study_design_scores_gemma":[0.004488317,0.0001872494,0.001225757,0.000116047,0.0001575752,0.000002277908,0.0002859999,0.005473667,0.9723939,0.009638039,0.004229131,0.001802009],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6637328,0.000005744059,0.332835,0.001752611,0.0001915828,0.0006656711,0.0005709766,0.0001019394,0.0001436266],"genre_scores_gemma":[0.9886776,9.940184e-8,0.003921708,0.004774318,0.001863432,0.0001716207,0.0004811113,0.000102134,0.000008017661],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3289133,"threshold_uncertainty_score":0.999858,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01803222954120689,"score_gpt":0.2557721748802891,"score_spread":0.2377399453390822,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}